Agency for Science, Technology and Research

National University of Singapore

Other

Nanyang Technological University

Institute of Microelectronics

Victor Samper

Hongmiao Ji

Uppili Sridhar

Lin Cong

Helmut F Schlaak

Pang Dow Foo

Kay Krupka

Dirk Wagenaar

Chen Yu

Olaf Knueppel

Feng Han Hua

Qasem Ramadan

Hui Wing Cheong

Santhiagu Ezhilvalavan

Daniel Puiu Poenar

A method of forming, in or on a Si substrate, planar micro-coils with coil windings of high aspect ratio (&#x3e;3) and a wide variety of geometric shapes. The micro-coils may be formed on a Si substrate and be embedded in a dielectric, or they may be formed in trenches within a Si substrate. The micro-coils may have field enhancing ferromagnetic pillars rising above the micro-coil plane, formed at positions of maximum magnetic field strength and the micro-coils may also include magnetic layers formed beneath the substrate and contacting the pillars to form a substantially closed pathway for the magnetic flux. The substrate may be thinned to membrane proportions. These micro-coils produce strong magnetic fields with strong field gradients and can be used in a wide variety of processes that involve the exertion of strong magnetic forces at small distances or the creation of magnetic wells for trapping and manipulating small particles.

Microfabricated system for magnetic field generation and focusing

Microfluidics packages and methods of use are described, comprising in one embodiment a substrate having a top surface and means to lower pressure on the top surface; a fluidics card having a bottom surface and means to allow fluids to traverse through the card; and a polymeric barrier film, the polymeric barrier film positioned between the top surface of the substrate and the bottom surface of the fluidics card.

Microfluidics packages and methods of using same

Microfluidics chips and methods of use are described, comprising a pair of wafers, at least one having a patterned surface, and two polymeric barrier films between the wafers conforming to the patterned surface. The polymeric barrier films allow the wafers of the inventive microfluidics chips to be reused without cleaning.

Microfluidics chips and methods of using same

An electrically stable PbLaTiO/PbZrTiO(PLT/PZT) ferroelectric structure may fabricated using precursor solutions formed using a simple sol-gel process. The PLT/PZT ferroelectric structure may be extended to a PLT/PZT/PLT ferroelectric capacitor structure. In terms of device application, better ferroelectric properties with reliable fatigue characteristics are desirable to render satisfactory performance and long device life. The PLT/PZT/PLT ferroelectric capacitor structure excels over previous hybrid structures by providing a larger remnant polarization, higher saturation polarization, lower coercive field and leakage current density and higher resistance to fatigue. The fabrication method involving the use of a PLT seeding layer acts to lower the fabrication temperature of the subsequent PZT layer and allows for a simpler sequence of processing steps that may be seen to substantially reduce manufacturing costs.

PLT/PZT ferroelectric structure

Microfluidics mixing apparatus and methods of using same are disclosed for mixing fluids using increasing centrifugal force as the fluids being mixed traverse a mixing channel. One inventive apparatus comprises a generally planar substrate having a top major surface and a bottom major surface generally parallel to the top major surface, and a cover plate over the top major surface. The substrate has at least one inlet port that routes fluid to the top major surface, and at least one outlet port for mixed fluid. The substrate comprises a mixing channel having a depth measured from the top surface and a width, the mixing channel adapted to route fluids to be mixed therein in laminar flow and in a substantially spiral flow pattern that is parallel to the top surface. Apparatus of the invention can mix fluids flowing serially, or two or more fluids entering the device from different feed channels.

Micromixer apparatus and methods of using same

A microstructure relay is provided, having a body that includes upper and lower portions. The lower portion is formed from a substrate, and the upper portion is formed on the substrate to avoid bonding of the lower portion to the upper portion. A support member is fixed to the body at a first end of the support member to form a cantilever, wherein an upper surface of the support member and a lower surface of the upper portion of the body form a cavity. A first contact region is located on the upper surface at a second end of the support member. The first contact region comprises a first contact, wherein pivoting the support member toward the lower surface causes the first contact to be electrically coupled to a counter contact.

Micro-relay

The present invention significantly reduces charging effects in electrostatic devices due to charge accumulation in or on the insulating materials on the active surfaces of the devices. This has been achieved by replacing the dielectric material that is normally present between the force generating conductor surfaces with a semi-insulating material. This semi-insulating film overcomes the effects of charging, while avoiding short-circuits when the surfaces are pulled into contact. It is not subject to insulation breakdown within the range of voltages used to operate the device. Examples of semi-insulating materials that may be used are semi-insulating polysilicon (SIPOS) and silicon rich silicon nitride.

Growing community of inventors

Singapore, Singapore

Victor Samper