Applied Materials, Inc.

Vibhas Singh

Lance A Scudder

Yuriy Melnik

David Masayuki Ishikawa

Sukti Chatterjee

Exemplary methods of forming a coating of material on a substrate may include forming a plasma of a first precursor and an oxygen-containing precursor. The first precursor and the oxygen-containing precursor may be provided in a first flow rate ratio. The methods may include depositing a first layer of material on the substrate. While maintaining the plasma, the methods may include adjusting the first flow rate ratio to a second flow rate ratio. The methods may include depositing a second layer of material on the substrate.

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San Jose, CA, United States of America

Vibhas Singh