National Institute for Materials Science

Vettiger Peter

Genki Yoshikawa

Terunobu Akiyama

Heinrich Rohrer

Yoshikawa Genki

Aono Masakazu

Nakayama Tomonobu

Gautsch Sebastian

Loizeau Frederic

Akiyama Terunobu

Deflection of a free end of one plate-like member, that is caused by uniform stress, is transmitted to an other plate-like member by moving a free end of the other plate-like member. According to this configuration, the uniform stress applied to the one plate-like member is converted into stress induced by a point force in the other plate-like member, and then, the induced stress is concentrated on a fixed end side narrow portion in which a piezoresistor is provided. Thus, a novel structure for a piezoresistive surface stress sensor having high sensitivity to uniform stress applied to the surface of the sensor is provided.

Surface stress sensor

Growing community of inventors

Neuchatel, Switzerland

Vettiger Peter