Applied Materials, Inc.

Venkatesh Babu

Visweswaren Sivaramakrishnan

Vinay K Shah

Satish Sundar

Chongyang Wang

Surinder S Bedi

Mario David Silvetti

Shay Assaf

Pyongwon Yim

Indrajit Lahiri

Adrian Rhee

Krishna Kumar Kuttannair

Douglas Kitajima

Robert D Flores

Brendan Hickey

Song J Park

A method and system for managing process jobs in a semiconductor fabrication facility is described. In one embodiment, the method includes receiving a plurality of process jobs associated with one or more priorities. The method further includes executing the plurality of process jobs in an order reflecting the priorities. The order is modifiable in real time upon receiving a new process job with a priority higher than the priorities of the plurality of process jobs.

Method and system for managing process jobs in a semiconductor fabrication facility

A robotic positioning system that cooperates with a sensing system to correct robot motion is provided. The sensing system is decoupled from the sensors used conventionally to control the robot's motion, thereby providing repeatable detection of the robot's true position. In one embodiment, the positioning system includes a robot, a controller, a motor sensor and a decoupled sensor. The robot has at least one motor for manipulating a linkage controlling the displacement of a substrate support coupled thereto. The motor sensor is provides the controller with motor actuation information utilized to move the substrate support. The decoupled sensor provides information indicative of the true position the substrate support that may be utilized to correct the robot's motion.

Method and apparatus for monitoring the position of a semiconductor processing robot

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San Jose, CA, United States of America

Venkatesh Babu