Applied Materials, Inc.

Venkata Raghavaiah Chowdhary Kode

Juan Carlos Rocha-Alvarez

Jeffrey C Hudgens

Charles T Carlson

Jason M Schaller

Benjamin B Riordon

Paul Zachary Wirth

Dmitry A Dzilno

Gary Wyka

Paul Forderhase

Mikhail Taraboukhine

Kiyki-Shiy N Shang

Mitchell DiSanto

Michael Carrell

Siva Chandrasekar

Implementations disclosed describe an integrated sensor controller comprising a sensor circuit and a logic circuit. The sensor circuit includes a light source driver to generate a driving signal, a demultiplexer to produce, using the driving signal, a plurality of output driving signals to be delivered to one of a plurality of sensors, and an amplifier to: receive a first signal from a first sensor, the first signal being associated with a first event representative of a position of a substrate within a device manufacturing machine, and generate a second signal. The sensor circuit further includes an analog-to-digital converter to receive the second signal and generate a third signal. The logic circuit includes a memory device and a processing device coupled to the memory device, the processing device to obtain based on the third signal, information about the position of the substrate.

Multiplexing control of multiple positional sensors in device manufacturing machines

Substrate transfer structure

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Pflugerville, TX, United States of America

Venkata Raghavaiah Chowdhary Kode