Mirrorcle Technologies, Inc.

Carl Zeiss Ag

Mirrocle Technologies Inc.

Veljko Milanovic

Abhishek Kasturi

Stefan Richter

Johannes Kindt

Gerhard Krampert

Michel Stutz

Günter Rudolph

A microelectromechanical system (MEMS) device includes a substrate, a suspended element and a damping structure connected to the suspended element and one or more fluid confinement structures. The suspended element is connected to a fixed part of the substrate by one or more flexures configured to permit movement of the suspended element relative to a fixed part of the substrate. The damping structure extends into a gap between the suspended element and the fixed part of the substrate. The damping structure includes one or more winglets that protrude over a recessed portion of the fixed part of the substrate. The fluid confinement structures are formed by the recessed portion of the fixed substrate and are configured to permit movement of the damping structure over the recessed portion of the substrate and confine a viscoelastic fluid to the limited portion of the gap underneath the winglets.

MEMS device with damping fluid vertically sandwiched between moving and non-moving structures

A microelectromechanical system (MEMS) device comprising a wafer including a MEMS device in a substrate of the wafer is mounted to a fluid dispenser stage. The MEMS device has a damping structure coupled to a suspended element and one or more fluid confinement structures. The suspended element is connected to a fixed part of the substrate by one or more flexures configured to permit movement of the suspended element relative to the fixed part of the substrate. The damping structure extends into a gap between the suspended element and fixed part of the substrate. The fluid confinement structures permit movement of the damping structure within a limited portion of the gap and confine a viscoelastic fluid to the limited portion of the gap. A viscoelastic fluid is deposited onto the wafer in an area of the wafer configured to communicate the viscoelastic fluid into the limited portion of the gap.

Fabrication of MEMS device with automated dispensing of damping fluid and viscosity control

A MEMS micromirror device comprising, a reflective movable mirror, and a surrounding substrate coplanar to the mirror. A physical gap between the mirror and the surrounding substrate filled with fluid and finger structures extend from a perimeter of the movable mirror into the physical gap.

MEMS actuators having a physical gap filled with fluid

MEMS devices include a suspended element connected to a fixed part of a substrate by one or more flexures, wherein the one or more flexures are configured to permit movement of the suspended element relative to a fixed part of the substrate. A sensor coupled to the suspended element and a damping structure coupled to the suspended element extends into a gap between the suspended element and the fixed part of the substrate. One or more fluid confinement structures are configured to permit movement of the damping structure within a limited portion of the gap and to confine a viscoelastic fluid to the limited portion of the gap.

MEMS device with improved dynamic mechanical performance through damping by localized viscoelastic medium

An apparatus, comprising one or more scan modules, each scan module having one or more laser sources that generate one or more laser beams and a beam deflector that deflects the one or more laser beams. A fluorescent emissive sheet (FES) receives the one or more laser beams deflected by the beam deflectors of the one or more scan modules and emits light of longer wavelength than that of the one or more laser beams at portions of the FES that are struck by the one or more laser beams. An optically transmissive viewing window coupled to a helmet wherein the light of longer wavelength than that of the one or more laser beams is projected onto the viewing window.

Head up display for helmet based on laser MEMS emissive film projection system

An apparatus, comprising two or more scan modules, each scan module having one or more laser sources that generate one or more laser beams and a beam deflector that deflects the two or more laser beams. A fluorescent emissive sheet (FES) receives the one or more laser beams deflected by the beam deflectors of the one or more scan modules and emits light of longer wavelength than that of the one or more laser beams at portions of the FES that are struck by the one or more laser beams. An optically transmissive viewing window coupled to a podium wherein the light of longer wavelength than that of the one or more laser beams is projected onto the viewing window.

Head up display for podium based on laser MEMS emissive film projection system

An apparatus, comprising two or more scan modules, each scan module having two or more laser sources that generate two or more laser beams and a beam deflector that deflects the two or more laser beams. A fluorescent emissive sheet (FES) receives the two or more laser beams deflected by the beam deflectors of the two or more scan modules and emit light of a first wavelength that is of a longer wavelength than that of the two or more laser beams at a first portion of the FES that is struck by the two or more laser beams. The two or more scan modules are disposed on a same side of the FES. The FES includes a second portion of the FES that emit a second wavelength of light that is different from the first wavelength and that has a longer than the wavelength than the two or more laser beams when the second portion is struck by the two or more laser beams. Imaging optics form a virtual image from the light emitted from the first portion or second portion of the FES that is struck by the two or more laser beams.

Head up display based on laser MEMS emissive film projection system

An apparatus includes a scan module having one or more laser sources that generate one or more initial laser beams and two or more beam deflectors that deflect the initial laser beam(s). A beam optic substantially collimates the initial laser beam(s) to produce one or more collimated laser beams. One or more beam deflector controllers control the angle of beam deflection from each beam deflector. Relay optics between the two or more beam deflectors image each sequential beam deflector onto the subsequent beam deflector in such a manner that the beam deflecting from the last beam deflector in an optical chain contains a combination or superposition of all the beam deflections of the beam deflectors in the sequence, and maintains a beam divergence of the one or more collimated beams.

An apparatus, comprising one or more scan modules, each scan module having one or more laser sources that generate one or more laser beams and a beam deflector that deflects the one or more laser beams. A fluorescent emissive sheet (FES) receives the one or more laser beams deflected by the beam deflectors of the one or more scan modules and emits light of longer wavelength than that of the one or more laser beams at portions of the FES that are struck by the one or more laser beams. The FES includes at least one pre-patterned image configured to be highlighted by the one or more laser beams. Imaging optics form a virtual image from the light emitted from the portions of the FES that are struck by the one or more laser beams.

Head up display based on laser MEMS emissive film projection system with pre-patterned content

An apparatus, comprising, a scan module having one or more laser sources that generate one or more initial laser beams and two or more beam deflectors that deflect the one or more initial laser beams. A beam optic is configured to substantially collimate the one or more initial laser beams to produce one or more collimated laser beams. One or more beam deflector controllers are configured to control an angle of beam deflection from each beam deflector. Relay optics between the two or more beam deflectors are configured to image each sequential beam deflector in an optical chain onto the subsequent beam deflector in such a manner that the beam deflecting from a last beam deflector in the optical chain contains a combination or superposition of all the beam deflections of the beam deflectors in the sequence, and maintains a beam divergence of the one or more collimated beams. A first beam deflector of the two or more beam deflectors is configured to scan about a single axis and a second beam deflector of the two or more beam deflectors is configured to scan in a quasi-static mode about two orthogonal axes.

Laser MEMS projection system with single-axis and dual axis beam deflectors

MEMS devices include a suspended element connected to a fixed part of a substrate by one or more flexures, wherein the one or more flexures are configured to permit movement of the suspended element relative to a fixed part of the substrate. An actuator coupled to the suspended element and a damping structure coupled to the suspended element extends into a gap between the suspended element and the fixed part of the substrate. One or more fluid confinement structures are configured to permit movement of the damping structure within a limited portion of the gap and to confine a viscoelastic fluid to the limited portion of the gap.

MEMS devices include fluid confinement structures on either a fixed part of a substrate and/or on a suspended element. The fluid confinement structures may be configured to confine a viscoelastic fluid in a limited part of a gap between one or more vertical sidewalls of both the fixed part of the substrate and either the suspended element or the drive beam or both the suspended element and drive beam such that one part of the gap is bridged by the fluid and another part of the gap is not, The structures may be configured to prevent flow of the fluid to other parts of the gap.

MEMS device

A MEMS device includes a movable mirror and a solid material below the mirror that removes more heat from the mirror and creates more viscous drag than if the solid material were absent while allowing free movement of the mirror. A MEMS system includes a movable mirror, transparent window, electronic package, and a fluid-tight cavity between the window and the electronic package filled with a fluid exhibiting higher thermal conductivity than air. Another system has a reflective movable mirror, transparent window, and a lid that holds the window close to the mirror without obstructing its free movement. There is greater vertical clearance between the MEMS system and lid than between the mirror and MEMS system. Another MEMS device has a movable mirror and a surrounding substrate coplanar to the mirror. A gap between the mirror and substrate is filled with fluid. Finger structures extend from the mirror into the gap.

MEMS actuators with improved performance and cooling

An apparatus includes a scan module having one or more laser sources that generate one or more initial laser beams and two or more beam deflectors that deflect the initial laser beam(s). A beam optic substantially collimates the initial laser beam(s) to produce one or more collimated laser beams. one or more beam deflector controllers control the angle of beam deflection from each beam deflector. Relay optics between the two or more beam deflectors image each sequential beam deflector onto the subsequent beam deflector in such a manner that the beam deflecting from the last beam deflector in an optical chain contains a combination or superposition of all the beam deflections of the beam deflectors in the sequence, and maintains a beam divergence of the one or more collimated beams.

There is provided a scanning mirror device with a microsystem scanning mirror which is mounted rotatably about at least one axis, and a detection module which has a light source which emits a light beam, and a position detector, wherein the detection module directs the light beam onto the scanning mirror from behind, with the result that the light beam is reflected, at the back of the scanning mirror, to the position detector which measures the position of the reflected light beam, from which the rotation angle of the scanning mirror about the at least one axis can be deduced.

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Richmond, CA, United States of America

Veljko Milanovic