Texas Instruments Corporation

Veera S Khaja

A Kathleen Hennessey

YouLing Lin

Ramakrishna Pattikonda

Rajasekar Reddy

C Rinn Cleavelin

A system and method for repairing a defect on a manufactured object, which may be a semiconductor wafer, uses a computer and a repair tool. The method includes placing the manufactured device on a moveable stage; capturing and preparing a digital-pixel-based representation of the image; symbolically decomposing the digital-pixel-based representation of an image to create a primitive-based representation of the image; analyzing the primitive-based representation of the image to detect and locate an anomaly; isolating primitives associated with the anomaly; comparing the isolated primitives associated with the anomaly with primitives in a knowledgebase to locate a set of primitives in the knowledgebase that are most like the isolated primitives associated with the anomaly; assigning a defect-type label associated with the set of primitives in the knowledge base that was most similar to the isolated primitives associated with the anomaly; and using a repair tool to repair the defect based on defect-type label for the anomaly.

System and method for circuit repair

A system and method for detecting anomalies on a manufactured device includes or utilizes a moveable stage for holding and positioning the device, a camera for capturing an image of the device on the stage, a digitizer coupled to the camera for producing a digital-pixel-based representation of the image, and a computer having a processor and memory. The computer is coupled to the digitizer for receiving the digital-pixel-based representation from the digitizer and coupled to the stage for selectively moving the stage to align the device. The computer is programmed to be operable to symbolically decompose a digital-pixel-based representation of an image to create a primitive-based representation of the image. The image may be aligned by the computer with respect to the rotation of geometric objects in the image by developing a histogram of angles and lengths and matching them to determine a rotational shift.

Growing community of inventors

Dallas, TX, United States of America

Veera S Khaja