University of California

Brookhaven Science Associates, Lcc

Valeriy V Yashchuk

Alexander Pines

Shoujun Xu

Dmitry Budker

David E Wemmer

Howard A Padmore

Eric M Gullikson

Rossana Cambie

Peter Z Takacs

Dmytro L Voronov

Thomas L Lowery

Wayne R McKinney

The present invention provides for test surfaces and methods for calibration of surface profilometers, including interferometric and atomic force microscopes. Calibration is performed using a specially designed test surface, or the Binary Pseudo-random (BPR) grating (array). Utilizing the BPR grating (array) to measure the power spectral density (PSD) spectrum, the profilometer is calibrated by determining the instrumental modulation transfer function (IMTF).

Test surfaces useful for calibration of surface profilometers

A diffraction grating structure having ultra-high density of grooves comprises an echellette substrate having periodically repeating recessed features, and a multi-layer stack of materials disposed on the echellette substrate. The surface of the diffraction grating is planarized, such that layers of the multi-layer stack form a plurality of lines disposed on the planarized surface of the structure in a periodical fashion, wherein lines having a first property alternate with lines having a dissimilar property on the surface of the substrate. For example, in one embodiment, lines comprising high-Z and low-Z materials alternate on the planarized surface providing a structure that is suitable as a diffraction grating for EUV and soft X-rays. In some embodiments, line density of between about 10,000 lines/mm to about 100,000 lines/mm is provided.

Ultra-high density diffraction grating

A laser-based atomic magnetometer (LBAM) apparatus measures magnetic fields, comprising: a plurality of polarization detector cells to detect magnetic fields; a laser source optically coupled to the polarization detector cells; and a signal detector that measures the laser source after being coupled to the polarization detector cells, which may be alkali cells. A single polarization cell may be used for nuclear magnetic resonance (NMR) by prepolarizing the nuclear spins of an analyte, encoding spectroscopic and/or spatial information, and detecting NMR signals from the analyte with a laser-based atomic magnetometer to form NMR spectra and/or magnetic resonance images (MRI). There is no need of a magnetic field or cryogenics in the detection step, as it is detected through the LBAM.

Atomic magnetic gradiometer for room temperature high sensitivity magnetic field detection

Growing community of inventors

Richmond, CA, United States of America

Valeriy V Yashchuk