Commissariat a L'energie Atomique Et Aux Energies Alternatives

Valerie Goudon

Abdelkader Aliane

Denis Pelenc

Claire Vialle

Xavier Zucchi

A microbolometer may include a sensitive material based on vanadium oxide (VO) with an additional chemical element such as boron (B), but excluding nitrogen (N), the sensitive material wherein the sensitive material (i) is amorphous, (ii) has an electrical resistivity at ambient temperature in a range of from 1 to 30 &#x3a9;&#xb7;cm, (ii) has a homogeneous chemical composition, and (iv) has an amount of boron, defined as a ratio of a number of boron to vanadium atoms to that of vanadium, at least equal to 0.086.

Process for manufacturing a microbolometer containing vanadium oxide-based sensitive material

The invention relates to a process for manufacturing a microbolometer () comprising a sensitive material () based on vanadium oxide (VO) comprising an additional chemical element chosen from among boron (B), carbon (C), with the exception of nitrogen (N), comprising the following steps:

A process for manufacturing at least one microbolometer comprising a sensitive material based on vanadium oxide containing nitrogen as additional chemical element, includes steps of determining a non-zero effective amount of the additional chemical element starting from which the sensitive material, having undergone a step of exposure to a temperature Tfor a duration &#x394;t, has an electrical resistivity &#x3c1;at ambient temperature greater than or equal to 50% of the native value &#x3c1;of said sensitive material at ambient temperature; producing the sensitive material in a thin layer having an amount of the additional chemical element greater than or equal to the effective amount determined beforehand, the sensitive material being amorphous and having an electrical resistivity of between 1 and 30 &#x3a9;&#xb7;cm; and exposing the sensitive material to a temperature Tfor a duration &#x394;t.

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Grenoble, France

Valerie Goudon