Commissariat &#xc0; L'&#xc9;nergie Atomique Et Aux &#xc9;nergies Alternatives

Valeria Toffoli

Eric Ollier

Thomas Alava

Bertrand Bourlon

A microelectromechanical gas sensor including a fixed part, at least one suspended part in relation to fixed part, at least one sensitive zone carried on the suspended part, the sensitive zone being able to adsorb/absorb and desorb gaseous species or families of gaseous species, a heater for heating at least the sensitive zone, a detector for detecting the adsorption/absorption and desorption of gaseous species or families of gaseous species on the sensitive zone, a controller of controlling the heater so that the heating is applied to at least the sensitive zone with one or more temperature profiles ensuring the adsorption/absorption and desorption of the gaseous species in a controlled manner so as to obtain an individual desorption of each species or families of gaseous species.

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Grenoble, France

Valeria Toffoli