Zedna Ab

Valentin Dubois

Göran Stemme

Frank Niklaus

Disclosed is a method of making a crack structure on a substrate, the crack structure being usable as a tunnelling junction structure in a nanogap device, including the controlled fracture or release of a patterned layer under built-in stress, thereby forming elements separated by nanogaps or crack-junctions. The width of the crack-defined nanogap is controlled by locally release-etching the film at a notched bridge patterned in the film. The built-in stress contributes to forming the crack and defining of the width of the crack-defined nanogap. Further, by design of the length of the bridge in a range between sub-&#x3bc;&#x3c0;&#x3b9; to &#x3e;25&#x3bc;&#x3b1;&#x3b9;, the separation between the elements, defined by the width of the crack-defined nanogaps, can be controlled for each individual crack structure from &#x3c;2 nm to &#x3e;100 nm. The nanogaps can be used for tunneling devices in combination with nanopores for DNA, RNA or peptides sequencing.

Crack structure and tunneling device with a layer exhibiting a crack-defined gap between two cantilevering parts

Disclosed is a method of making a crack structure on a substrate, the crack structure being usable as a tunneling junction structure in a nanogap device, including the controlled fracture or release of a patterned layer under built-in stress, thereby forming elements separated by nanogaps or crack-junctions. The width of the crack-defined nanogap is controlled by locally release-etching the film at a notched bridge patterned in the film. The built-in stress contributes to forming the crack and defining of the width of the crack-defined nanogap. Further, by design of the length of the bridge in a range between sub-&#x3bc;&#x3c0;&#x3b9; to &#x3e;25&#x3bc;&#x3b1;&#x3b9;, the separation between the elements, defined by the width of the crack-defined nanogaps, can be controlled for each individual crack structure from &#x3c;2 nm to &#x3e;100 nm. The nanogaps can be used for tunneling devices in combination with nanopores for DNA, RNA or peptides sequencing.

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Stockholm, Sweden

Valentin Dubois