Asml Netherlands B.v.

Vadim Iourievich Timoshkov

Jan Bernard Plechelmus Van Schoot

Andrei Mikhailovich Yakunin

Antonius Theodorus Wilhelmus Kempen

Edgar Alberto Osorio Oliveros

There is provided a multilayer mirror () comprising a layer of a first material () and a layer of silicon (). The layer of the first material and the layer of silicon form a stack of layers. An exposed region of the layer of silicon comprises a modification that is arranged to improve the robustness of the exposed region of silicon.

Growing community of inventors

Veldhoven, Netherlands

Vadim Iourievich Timoshkov