Average Co-Inventor Count = 10.00
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Carl Zeiss Smt Gmbh (3 from 1,413 patents)
3 patents:
1. 9575414 - Illumination system for a microlithographic projection exposure apparatus
2. 9217930 - Illumination system for a microlithographic projection exposure apparatus
3. 8395756 - Illumination system for a microlithographic projection exposure apparatus