Advanced Micro Devices Corporation

Globalfoundries Inc.

Uwe Liebold

Kay Hellig

Heiko Wagner

Peter Goerigk

Ronald Gruenz

Ronald Grünz

Karl-Heinz Fandrey

The RMS database for a semiconductor process line is established on the basis of product groups or categories, wherein all members of a category are linked by a common feature, such as a common basic design or a common basic technology. Common process recipes in a specified category may then be set up only once, thereby reducing the amount of effort for establishing the database. Moreover, new product types may be readily incorporated into the categories, thereby enabling the employment of the already-established category-specific context information.

Method of providing context specific recipes in a semiconductor facility by defining product categories

In a production line, a cluster tool having a plurality of substantially identical process modules and a metrology tool includes a control unit that allows one to receive, store and process information that indicates in which process module which substrates have been processed and which selects, on the basis of the process information, which substrate has to be subjected to a measurement. Advantageously, the substrates are selected so that each process module is represented by a corresponding substrate to be measured in order to reliably monitor the process quality of each process module.

Method and system for handling substrates in a production line including a cluster tool and a metrology tool

Growing community of inventors

Kleinroehrsdorf, Germany

Uwe Liebold