Pfeiffer Vacuum Gmbh

Uwe Leib

Jan Hofmann

Mirko Mekota

Bernhard Koch

Michael Schill

Torsten Gogol

A vacuum pump includes a pump inlet, a pump outlet, a rotor rotatable about an axis of rotation, at least one process gas pump stage for conveying a process gas present at the pump inlet from the pump inlet to the pump outlet, a motor space, and a drive motor which is arranged in the motor space, is configured for rotationally driving the rotor and which has a motor stator, wherein at least one gas path is provided for the process gas from the pump inlet to the pump outlet which leads through the motor space and which leads at least sectionally along the motor stator or through the motor stator.

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Weilburg, Germany

Uwe Leib