Advanced Micro Devices Corporation

Uwe Knappe

Uwe Schulze

Rolf Seltmann

Jan Raebiger

A controller and a method of controlling a process tool is provided, in which machine constants used for calibrating manipulated variables of the control algorithm are explicitly introduced into the process model, thereby providing an enhanced controller behavior immediately after the introduction of new measurement values of the machine constants.

Method and system for advanced process control including tool dependent machine constants

A technique is disclosed that allows alignment of substrates on a run-to-run basis by using the position data of one or more previously aligned substrates to determine a setpoint of a pre-alignment process for one or more subsequent substrates. The setpoint may also be determined on the basis of a predefined characteristic of the substrates to be aligned.

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Munich, Georgia

Uwe Knappe