Robert Bosch

Uwe Kasten

Ulrich Kallmann

Jochen Strähle

Rahmi Gencoglu

An interferometric system having an illumination arm, including a light source and an illuminating optical system, for forming an illuminating beam; an object arm, including a reference element for measuring an object having an object surface to be measured, for forming an image-rays path, the object to be measured having an object surface inaccessible to direct illumination; a reference arm including a reference element; a detector arm including a detector; and a beam splitter, the reference element having one or more mirrored zones. Consequently, component parts which have undercut surfaces in the illumination direction can be measured in a single measuring operation.

Growing community of inventors

Moeglingen, Germany

Uwe Kasten