Infineon Technologies Ag

Nan Ya Technology Corporation

Globalfoundries Inc.

Uwe Kahler

Dirk Efferenn

Jens Bachmann

Chung-Hsin Lin

Wen-Bin Lin

Peter Baars

Dirk Offenberg

Marco Lepper

Jens Hahn

Vivien Schroeder

Grit Bonsdorf

Ronald Gottzein

Lee Donohue

The amount of Pt residues remaining after forming Pt-containing NiSi is reduced by performing an Oflash while shaping gate spacers, and then cleaning and applying a second application of Aqua Regia. Embodiments include sputter depositing a layer of Ni/Pt on a semiconductor substrate, annealing the Ni/Pt layer, wet stripping unreacted Ni, annealing the Ni stripped Ni/Pt layer, stripping unreacted Pt from the annealed Ni/Pt layer, e.g., with Aqua Regia, treating the Pt stripped Ni/Pt layer with an oxygen plasma, cleaning the Ni/Pt layer, and stripping unreacted Pt from the cleaned Ni/Pt layer, e.g., with a second application of Aqua Regia.

Mol insitu Pt rework sequence

The invention is concerned with a process for removing residue comprising a polymeric resist and metal oxide from a metal structure on a semiconductor substrate, the process comprising the steps of: (a) heating up the substrate with the metal structure in the presence of molecular nitrogen gas (N); (b) a stabilization step in the presence of pure molecular nitrogen gas (N); (c) a passivation step employing a plasma containing at least one of the group of water, nitrogen and oxygen; and (d) a stripping step containing oxygen to remove the residue, comprising resist.

Process for removing a residue from a metal structure on a semiconductor substrate

A method for providing whisker-free aluminum metal lines or aluminum alloy lines in integrated circuits includes the following steps: providing a substrate; providing a whisker-containing layer made of aluminum metal or an aluminum alloy on the substrate; back-etching and/or resputtering the whisker-containing layer such that the whiskers are essentially removed; and structuring the whisker-free layer into the lines.

Method for providing whisker-free aluminum metal lines or aluminum alloy lines in integrated circuits

A method for fabricating an integrated circuit device, an electrically conductive substrate being provided, an insulation layer being deposited on the substrate, the insulation layer being etched in structures, a contact-making layer being deposited on the patterned insulation layer and on the substrate in depressions which have first and second lateral dimensions, the contact-making layer being etched back in such a way that the contact-making layer is preserved in the structures with the depressions which have first lateral dimensions of the order of magnitude of the structure depth of the insulation layer and the contact-making layer is removed in the structures with depressions which have second lateral dimensions significantly greater than the structure depth of the insulation layer.

Method for fabricating an integrated circuit device with through-plating elements and terminal units

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Dresden, Germany

Uwe Kahler