Von Ardenne Anlagentechnik Gmbh

Von Ardenne Asset Gmbh &co. Kg

Von Ardenne Gmbh

Uwe Graupner

Martin Dimer

Hans-Christian Hecht

Tina Schoessler

Thomas Knoth

Ralf Sturm

Martin Thumsch

Tina Schössler

Disclosed herein are devices, systems, and methods for processing a solar cell precursor. The processing may include forming a transparent, electrically conductive first layer over the solar cell precursor. The processing may also include forming a transparent, electrically conductive second layer over the solar cell precursor, preferably in physical contact with the first layer. The first layer may comprise at least indium, zinc, and oxygen and the second layer may comprise oxygen and a greater proportion of indium than the first layer.

Method of forming transparent layers for a solar cell

A method is provided for depositing a transparent conductive oxide (TCO) layer on a substrate, in which contaminations of the layers of the layer system is reduced through the diffusion of material from the substrate, and whose layer properties in respect to coupling and transmission of light are optimized. For that purpose, a barrier layer, a seed layer and a transparent conductive oxide layer are directly successively deposited on the substrate. Also, a thin-film solar cell is described which comprises such a transparent conductive oxide layer.

Method for depositing a transparent conductive oxide (TCO) film on a substrate and thin-film solar cell

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Dresden, Germany

Uwe Graupner