Microsoft Technology Licensing, LLC

University of Washington

Microvision, Inc.

Utku Baran

Wyatt Owen Davis

Joshua Owen Miller

Mark Alan Champion

Hakan Urey

Dean R Brown

Ruikang K Wang

Michael James Nystrom

Gregory Theodore Gibson

Fei Chen

Xiao Chuan Ong

Joseph Michael Luizzi

Seungwoo Lee

Robert J Dyer

Siavash Yousefi

A MEMS scanner may include a first flexible arm extending substantially in a forward direction and a base connected to a proximal end of the first flexible arm, the base being thicker than the first flexible arm in a vertical direction. The MEMS scanner may further include a second flexible arm connected to a distal end of the first flexible arm, the second flexible arm extending substantially in a reverse direction. The MEMS scanner may further include a mirror coupled to a distal end of the second flexible arm. In one implementation, the MEMS scanner may be a non-resonant scanner.

MEMS scanner

Examples are disclosed that relate to pixel-shifting devices for increasing display resolution. An example pixel-shifting device comprises an outer frame, an inner frame coupled to the outer frame via a flexure, a path-shifting optical element mounted to the inner frame, and one or more piezoelectric actuators configured to drive motion of the inner frame.

Pixel shifting device

A microelectromechanical systems (MEMS) scanning device comprising a torsional beam flexure that has a variable width in relation to a rotational axis for a scanning mirror. The geometric properties of the torsional beam vary along the rotational axis to increase a desired mode of mechanical strain at a location where a strain sensor is operating within the MEMS scanning device to generate a feedback signal. The torsional beam flexure mechanically suspends the scanning mirror from a frame structure. During operation of the MEMS scanning device, actuators induce torsional deformation into the torsional beam flexure to cause rotation of the scanning mirror about the rotational axis. The degree or amount of this torsional deformation is directly related to the angular position of the scanning mirror and, therefore, the desired mode of mechanical strain may be this torsional deformation strain component.

Microelectromechanical system (MEMS) scanner having a torsional beam flexure with variable width

A microelectromechanical systems (MEMS) scanner having actuator pairs adjacent to sides of a scanning mirror. Actuator pairs include individual actuators that are physically located adjacent to opposite sides of the scanning mirror and that, upon activation, induce angular rotation into the scanning mirror. Torsional beam flexures suspend the scanning mirror from a frame structure and facilitate rotation of the scanning mirror about a rotational axis. During operation of the MEMS scanner, a drive signal may be applied to the actuator pair to cause each individual actuator, of the actuator pair, to deform in unison, thereby generating some degree of tip deflection. Since the torsional beam flexures are connected to the tips of the actuators via the lever arms, this tip deflection serves as actuator stroke that induces torsional deformation into the torsional beam flexure&#x2014;thereby causing rotation of the scanning mirror about the rotational axis.

Microelectromechanical system (MEMS) scanner having actuator pairs cantilevered adjacent to opposite sides of a scanning mirror

A display device includes a light source, a support structure, and a scanning mirror system. The scanning mirror system includes a mirror, a first anchor located at a first lateral side of the scanning mirror system, a second anchor located at a second lateral side of the scanning mirror system, and a flexure. A first portion of the flexure extends from the first anchor toward a first longitudinal end and turns to meet a first end of the mirror. A second portion extends from the second anchor toward a second longitudinal end and turns to meet to a second end of the mirror opposite the first end. An actuator system is configured to actuate the flexure to thereby vary a scan angle of the mirror.

Display device with compact scanning mirror

Scanning mirror systems for display devices are disclosed. A display device comprises a light source and a scanning mirror system coupled to a support structure, the scanning mirror system comprising a mirror, a flexure supporting the mirror, and a first anchor and a second anchor each coupled to the support structure. The scanning mirror system further includes a first arm extending between the first anchor and a first portion of the flexure, a second arm extending between the first anchor and a second portion of the flexure, and also includes a third arm, a fourth arm, and an actuator system. Each of the first arm and the second arm define a respective gap that extends inwardly from an outer perimeter of the scanning mirror system. The actuator system is configured to actuate the arms to vary a scan angle of the mirror.

Display device having scanning mirror system

The present disclosure relates to a microelectromechanical systems (MEMS) scanner that implements piezoelectric actuation principles to facilitate rotational displacement of a mirror device. The present disclosure includes a MEMS scanning device having a mirror device, a torsional beam structure, and piezoelectric actuators having a shape that facilitates torsional force to be applied to the torsional beam structure and cause the mirror device to rotate about a longitudinal axis. The MEMS scanning device may further include a lever device including multiple stages to both transfer torsional force from the actuators and prevent different actuators from countering torsional forces of other actuators. Moreover, the MEMS scanning device may further include sensor elements to measure torsional forces and control movement of the mirror device.

Non-resonant microelectromechanical systems scanner with piezoelectric actuators

Examples are disclosed that relate to scanning display systems. One example provides a display device comprising a controller, a light source, and a scanning mirror system. The scanning mirror system comprises a scanning mirror configured to scan light from the light source in at least one direction at a resonant frequency of the scanning mirror, and an electromechanical actuator system coupled with the scanning mirror and being controllable by the controller to adjust the resonant frequency of the scanning mirror.

Adjusting a resonant frequency of a scanning mirror

A micro electro mechanical system is provided. The micro electro mechanical system includes a first part bonded to a second part by a structural adhesive interface. The structural adhesive interface includes a conductive structural adhesive portion, and a non-conductive structural adhesive portion at least partially surrounding the conductive structural adhesive portion. The conductive structural adhesive portion and the non-conductive structural adhesive portion have a thixotropy index greater than one.

Adhesive bonded micro electro mechanical system

A micro-electro mechanical system (MEMS) scanner has a backside reinforcement structure configured to concentrate stress which is exerted against the reinforcement structure at contour points. The reinforcement structure is attached to an underside of a mirror to maintain mirror flatness. Characteristics and features of the contour points are variable based on the specific application, including considerations for the design of the MEMS scanner, mirror, and reinforcement structure. The contour points are configured for concentration of stress to relieve stress from relatively weaker areas on the reinforcement structure, thereby increasing reliability and performance of the MEMS scanner. For example, a point of failure on the reinforcement structure may be where a top silicon layer and transition layer (e.g., silicon oxide layer) adjoin. Implementation of the contour points can concentrate stress at the contour points and thereby relieve stress from the weaker areas.

Backside reinforcement structure design for mirror flatness

The present disclosure generally relates to a method, and apparatus implementing the method for removing particulate accumulation from an optical element of a micro electromechanical systems (MEMS) package. The method may select a cleaning mode based, at least in part on, one or more of output of a sensor or a maintenance routine. Cleaning modes may include actuating, using an actuator of the MEMS package, one of a plurality of motion modes across the optical element. Optionally, the cleaning mode may include applying, using a power source of the MEMS package, a charge to the optical element. The disclosed techniques may enable the MEMS package to automatically and dynamically remove particulate matter without introducing additional mechanical elements.

Techniques for removing particulate from an optical surface

The present technology relates generally to systems and methods for in vivo visualization of lymphatic vessels. A system includes an optical coherence tomography (OCT) device and a computing device coupled to the OCT device configured to cause the OCT device to perform an OCT scan, generate image data in response to the OCT scan, and apply an eigendecomposition filter to the image data to produce processed image data. Alternatively or in addition, the computing device can compensate for scattering attenuation along an optical axis of the OCT scan in the image data set to generate compensated image data, enhance contrast of the compensated image data along a cross-section substantially orthogonal to the optical axis to generate contrast-enhanced image data, and identify at least one lymphatic vessel in the image data.

Systems and methods for in vivo visualization of lymphatic vessels with optical coherence tomography

A piezoelectric actuated device includes one or more areas of piezoelectric material coupled to a substrate. The piezoelectric material may be placed on regions of the substrate that exhibit the greatest curvature and stress when the device is vibrating according to a desired structural Eigenmode of vibration. The piezoelectric material may have a non-uniform density.

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Seattle, WA, United States of America

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