Carl Zeiss Microscopy Gmbh

Universitat Ulm

Ute Kaiser

Lorenz Lechner

Johannes Biskupek

A process for manufacturing a TEM-lamella includes mounting () a plate shaped substrate having a thickness in a support, manufacturing () a first, strip-shaped recess on a first side of the substrate under a first angle to the support by means of a particle beam, and manufacturing () a second strip-shaped recess on a second side of the substrate under a second angle to the support by means of a particle beam, such that the first and the second strip-shaped recess mutually form an acute or right angle, and between them form an overlap region of lesser thickness. The lamella has a thicker rim region and a thinner central region, with a first strip-shaped, recess on a first side of the lamella and a second strip-shaped recess on a second side of the lamella, wherein the first and the second strip-shaped recess mutually form an acute or right angle, and between them form an overlap region having a thickness of below 100 nm. An apparatus for executing the process or manufacturing the lamella includes a lamella support pivotable about a transverse axis and a longitudinal axis inclined, to the vertical direction, a device for rotating about the longitudinal axis, and stop means for limiting a tilt of the lamella support about the transverse axis.

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Ulm, Germany

Ute Kaiser