Western Digital (fremont), Inc.

Intel Corporation

Read Rite Corporation

Fujifilm Dimatix, Inc.

Ut Tran

Zhigang Bai

Ruolin Li

Yufeng Hu

Kevin K Lin

Hamid Eslampour

Achintya K Bhowmik

Jinshan Li

Nagesh K Vodrahalli

Shawn M Tanner

William Wong

Hai-Feng Liu

Gennady Farber

Shing Lee

Arman Hajati

Zhongyan Wang

Darren Todd Imai

Zhanjie Li

Feng Q Liu

Yong Shen

Sharat Batra

Zhong Shi

David A G Deacon

Dimitre A Latev

Jesper Arentoft Jayaswal

Jun Liu

Yimin Guo

Shaoping Li

Yingjian Chen

Mirzafer K Abatchev

Jinqiu Zhang

Anders Grunnet-Jepsen

John N Sweetser

Lien-Chang Wang

Hongxing Yuan

Sergei L Sochava

Steven C Rudy

Tsung Yuan Chen

Yi Ding

Hugh Craig Hiner

Peng Luo

Durga P Ravipati

Xuejun Ying

Yunhe Huang

Jikou Zhou

Li He

Lei Zhang

Jerome S Marcelino

Curtis V Macchioni

Martin Schoeppler

Keith Y Sasaki

Yunju Ra

Son Tran

Jesper Jayaswal-Arentoft

Jesper Jayaswal-Arentoff

Hiroaki Fukuto

Tran Son

Tai Lee

Dimitre Latev

Deacon David

A plurality of transducer elements are formed. For each of the plurality of transducer elements, an electrode of the transducer element is formed on a first side of a support layer. A piezoelectric element of the transducer element is formed on the first side of the support layer. An interconnect of the transducer element is formed in the support layer. The support layer is thinned to expose a second side of the support layer. The interconnects of the plurality of transducer elements extend between the first side and the second side of the support layer. The second side of the support layer is bonded to a flexible layer with an adhesive material. Conductive fillers are disposed in the adhesive material. The interconnects of the plurality of transducer elements are each electrically coupled via the conductive fillers to the corresponding interconnect extending through the flexible layer.

Method for fabricating flexible micromachined transducer device

Techniques and mechanisms to provide mechanical support for a micromachined piezoelectric transducer array. In an embodiment, a transducer array includes transducer elements each comprising a respective membrane portion and a respective supporting structure disposed on or around a periphery of that membrane portion. The transducer elements are initially formed on a sacrificial wafer, wherein supporting structures of the transducer elements facilitate subsequent removal of the sacrificial wafer and/or subsequent handling of the transducer elements. In another embodiment, a polymer layer is disposed on the transducer elements to provide for flexible support during such subsequent handling.

Method, apparatus and system for a transferable micromachined piezoelectric transducer array

Techniques and structures for providing flexibility of a micromachined transducer array. In an embodiment, a transducer array includes a plurality of transducer elements each comprising a piezoelectric element and one or more electrodes disposed in or on a support layer. The support layer is bonded to a flexible layer including a polymer material, wherein flexibility of the transducer array results in part from a total thickness of a flexible layer. In another embodiment, flexibility of the transducer array results in part from one or more flexural structures formed therein.

Flexible micromachined transducer device and method for fabricating same

A method and system provide a magnetic transducer having an air-bearing surface (ABS). The magnetic transducer includes a main pole having a pole tip, at least one auxiliary pole and at least one coil for energizing the main pole. The auxiliary pole(s) are adjacent to the main pole in a down track direction and recessed from the ABS. The coil(s) have a plurality of turns. At least one of the turns is between the auxiliary pole(s) and the ABS.

Ultra-short yoke length writer

A method fabricates an interferometric tapered waveguide (ITWG) for a heat-assisted magnetic recording (HAMR) transducer. The ITWG is defined from at least one waveguide layer. The waveguide layer(s) include an energy sensitive core layer. The energy sensitive core layer has an index of refraction that varies in response to exposure to energy having a particular wavelength range. The step of defining the ITWG includes defining a plurality of arms for the ITWG. At least one phase difference between the arms is determined. At least one of the arms is exposed to the energy such that the index of refraction of the energy sensitive core layer in the arm(s) is changed and such that the phase difference(s) between the arms is changed.

Method for compensating for phase variations in an interferometric tapered waveguide in a heat assisted magnetic recording head

A method of forming a single layer inductive coil structure includes forming a first conductive coil on a substrate, forming an insulating layer by atomic layer deposition (ALD) over the first coil and the substrate, and forming one or more additional conductive coils on each of adjacent sides of the first coil insulated from the first coil and the substrate by the insulating layer. A method of forming a stacked layer inductive coil includes forming a cavity in a substrate, forming a first coil in the cavity wherein the cavity has an atomic layer deposition (ALD) layer, forming a second coil in the cavity adjacent to the first coil and separated by the ALD layer from the first coil, forming an insulating layer over the first and second coil, and forming a third coil on the insulating layer.

Short yoke length coils for magnetic heads in disk drives

Methods for manufacturing hybrid coils for magnetic write heads used in disk drives are described. One such embodiment includes a magnetic read/write head including a read transducer, and a write transducer including a pair of write poles, a hybrid coil including a first coil having a pancake coil configuration with at least one turn positioned between the pair of write poles, and a second coil having a helical coil configuration including a plurality of turns positioned between the pair of write poles, the second coil coupled to the first coil, where the at least one turn of the first coil is interleaved with the turns of the second coil.

Methods for manufacturing hybrid coils for magnetic write heads used in storage systems

A method for fabricating a structure in a magnetic recording transducer is described. A trench having sidewalls converging in a corner and a depth is formed. A dielectric layer is deposited using physical vapor deposit (PVD). The dielectric layer thickness is not more than one-half of the trench depth. A remaining portion of the trench is unfilled by the dielectric layer and has a top and a bottom. A portion of the dielectric layer is plasma etched. The plasma etch removes the portion of the dielectric layer at the top of the trench at a first rate and removes the portion of the dielectric layer at the bottom of the remaining portion of the trench at a second rate less than the first rate. An additional dielectric layer is deposited, also using PVD. The plasma etch and additional dielectric layer depositing steps are optionally repeated until the trench is filled.

Method for providing a structure having reduced voids in a magnetic recording transducer

A method provides an EAMR transducer. The EAMR transducer is coupled with a laser and has an ABS configured to reside in proximity to a media during use. The method includes providing an NFT using an NFT mask. The NFT resides proximate to the ABS and focuses the laser energy onto the media. A portion of the NFT mask is removed, forming a heat sink mask covering part of the NFT. Optical material(s) are deposited, covering the heat sink mask and the NFT. The heat sink mask is removed, providing an aperture in the optical material(s). A heat sink corresponding to the aperture is provided. The heat sink bottom is thermally coupled with the NFT. A write pole for writing to the media and coil(s) for energizing the write pole are provided. The write pole has a bottom surface thermally coupled with the top surface of the heat sink.

Method and system for providing an energy assisted magnetic recording writer having a self aligned heat sink and NFT

A magnetic recording transducer for use in a data storage device includes a writer pole with a ABS surface, trailing edge bevel and a trailing shield. The effective throat height of the writer main pole is reduced by the use two gap layers between the writer main pole and the trailing shield. A first gap layer is on and in contact with the writer pole trailing surface, and a second gap layer is on a section of the first gap layer on the writer pole trailing edge bevel, from a point removed from the ABS surface and absent from a part on a section of the first gap layer on the writer pole trailing edge bevel nearest the ABS. A method of fabricating the transducer is also provided.

Magnetic recording transducer with short effective throat height and method of fabrication

A method and system provide a magnetic transducer having an air-bearing surface (ABS). The magnetic transducer includes a write pole and a coil. The write pole has a pole tip and a yoke. The coil energizes the write pole and includes a plurality of turns. A turn of the plurality of turns has a first portion and a second portion. The first portion has a first length in a stripe height direction substantially perpendicular to the ABS. The second portion has a second length in the stripe height direction. The second length is greater than the first length and extends at least to at least one adjacent turn.

Magnetic writer configured for high data rate recording

A method and system provide a magnetic transducer having an air-bearing surface (ABS). The magnetic transducer includes a write pole and at least one coil. The write pole has a pole tip and a yoke. The coil(s) energize the write pole. The coil(s) include a plurality of turns a first distance from the pole and at least one additional turn a second distance from the pole. The first distance is different from the second distance. The at least one additional turn extends over at least part of two of the plurality of turns, has a length in a stripe height direction perpendicular to the ABS and has a height in a down track direction. The length is greater than the height.

Magnetic writer having a low aspect ratio two layer coil

A structure for measuring energy absorption by a surface plasmon receptor or NFT on a waveguide comprises a first waveguide, a first input grating for coupling light comprising a first wavelength into the first waveguide, a first output grating for coupling light out of the first waveguide, a first plurality of surface plasmon receptors in cooperation with the first waveguide to receive light energy and located between the first input grating and the first output grating. The structure may further comprise a second waveguide, a second input grating for coupling light into the second waveguide, a second output grating for coupling light out of the second waveguide, a second plurality of surface plasmon receptors between the second input grating and the second output grating and in cooperation with the second waveguide to receive light energy, wherein the second plurality may be less than or greater than the first plurality.

Structure and method to measure waveguide power absorption by surface plasmon element

A method for manufacturing a magnetic transducer is described. The method includes providing a negative mask having a bottom, a plurality of sides, and a top wider than the bottom. The method also includes depositing a nonmagnetic layer on the negative mask. The nonmagnetic layer has a plurality of portions covering the plurality of sides of the negative mask. The method also includes providing a first mask having a first trench therein. The negative mask resides in the first trench. The method further includes depositing side shield material(s), at least a portion of which resides in the first trench. The method further includes removing the negative mask to create a second trench between the plurality of portions of the nonmagnetic layer and form a pole, at least a portion of which resides in the second trench.

Method for manufacturing a magnetic recording transducer having side shields

A method and system for providing an energy assisted magnetic recording (EAMR) transducer coupled with a laser. The EAMR transducer has an air-bearing surface (ABS) configured to reside in proximity to a media during use. The EAMR transducer includes a write pole, at least one coil, a waveguide and an output device. The write pole is configured to write to a region of the media. The at least one coil is for energizing the write pole. The waveguide has an input optically coupled to the laser and configured to direct energy from the laser toward the ABS for heating the region of the media. The output device is optically coupled to the waveguide. The output device coupling out a portion of the energy not coupled to the media.

Method and system for optically coupling a laser with a transducer in an energy assisted magnetic recording disk drive

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Ut Tran