Inficon Gmbh

Inficon Ag

Urs Wälchli

Martin Wüest

Bernhard Andreaus

Per Björkman

Hansjakob Hanselmann

Stefan Kaiser

Heikki Saari

Jarkko Antila

Astrid Waldner

Carsten Strietzel

Stanislav Duris

Christian Riesch

Mario Weder

Michael Trefzer

Antila Jarkko

The present invention relates to a device for plasma generation in a wide pressure range. The device comprises a first plasma source () in a first discharge chamber () in order to generate a first plasma in a low-pressure range, a second plasma source () in a second discharge chamber () in order to generate a second plasma in a high-pressure range, a first coupling element () for coupling the device to a system, in order to guide gas out of the system, and a second coupling element () for coupling the device to an optical sensor (). The first discharge chamber () has a first optical connection with at least one optical lens () to the second coupling element () and the second discharge chamber () has a second optical connection with at least one optical lens () to the second coupling element (). This invention further relates to a system for optical gas analysis or gas detection and corresponding methods for plasma generation and for operating the system.

Device and method for plasma generation in a wide pressure range and system and method for optical gas analysis/detection by means of such a device

Chamber () for bounding a plasma generation area () in a vacuum pressure sensor (), wherein the chamber comprises an electrically conductive casing element (″) located radially on the outside relative to a central axis, wherein the chamber comprises electrically conductive wall elements (″) arranged substantially perpendicular to the central axis and connected to the casing element, wherein at least one of the wall elements has a first opening (), through which the central axis extends, wherein the casing element comprises at least a first (B) and a second region (B), wherein the first region is located closer to the central axis than the second region. The invention further relates to a vacuum pressure sensor comprising the chamber.

Chamber for an ionization vacuum gauge

The invention relates to a methodfor determining a pressure in a vacuum system, wherein the method comprises the steps of:

Method for detecting pressure, and pressure sensor

A manufacturing method for a vacuum measuring cell provides first and second AlOceramic or sapphire housing bodies on opposite sides of an AlOceramic or sapphire membrane sealed to the bodies at its opposite peripheral edges. A reference vacuum chamber and a measuring vacuum chamber are on opposite sides of the membrane. An optical transparent window is provided in the first housing body and an optically reflective material is provided on a central region of the membrane. A lens is above the optical transparent window for optically linking to the optically reflective material on the membrane and an optical fiber outside the reference vacuum chamber and at a distance from the optical transparent window feeds light through the lens and window and in and out onto the optically reflective material on the membrane so that the level of membrane deflection is detected by a Fabry-Perot Interferometer.

Optical interferometric pressure sensor manufacturing method

A shield arrangement for a vacuum measuring cell has a tubular shield housing encompassing a shield and an exit port for connection to a vacuum measuring cell and a connection opening for the object space to be measured. The shield is between the two openings and is implemented as a screw shield with spiral convolutions, its thread flange in the outer diameter being in contact on the inner wall of the shield housing such that a gas throughflow between the outer diameter of the thread flange and the inner wall is inhibited and is substantially forced into the spiral thread flight, and the exit port is on one side of the tubular section and the connection opening is on the other, opposite side and the screw shield is implemented such that in the axial line of vision the shield arrangement between the two openings is optically tight.

Shield arrangement for a vacuum cell

A vacuum measuring cell has a first housing body and a membrane, both of AlOceramic or sapphire. The membrane is planar with a peripheral edge joined by a first seal to the first housing body to form a reference vacuum chamber. A second housing body of AlOceramic or sapphire opposite the membrane, is joined to the peripheral edge of the membrane by a second seal to form a measurement vacuum chamber. A port connects the vacuum measuring cell to a medium to be measured. At least in the central area of the first housing body, an optical transparent window is formed and at least the central region of the membrane has an optically reflective surface. Outside the reference vacuum chamber, in opposition to and at a distance from the window, an optical fibre is arranged for feeding in and out light onto the surface of the membrane.

Growing community of inventors

Chur, Switzerland

Urs Wälchli