Sensirion Ag

Urs Rothacher

Felix Mayer

René Hummel

Mathias Deschler

Moritz Lechner

Andreas Martin Haeberli

Vincent Hess

Felix Martin Mayer-Friedrich

A method and device are disclosed for calibrating sensors, which sensors are arranged on semiconductor chips and are e.g. to be used for detecting a substance in a fluid. The sensors are calibrated while they are still assembled on a semiconductor wafer by exposing the wafer to a calibration fluid containing a known amount of the substance to be measured. Hence, rather than first cutting the wafer, the sensors are calibrated at an early stage. For this purpose, they are placed on a chuck below a lid. The calibration fluid with known parameters is introduced between the wafer and the lid. This allows to test and calibrate a large number of sensors quickly.

Method and device for calibration sensors

The humidity detector comprises a housing adapted to hold a humidity sensor towards the windscreen of a vehicle or any other type of window. A flexible printed circuit board is arranged between the humidity sensor and the windscreen and provides a connection between the humidity sensor and further circuitry of the detector. The humidity sensor is located under a cap, which is engaged by a glider member. A spring pushes the glider member towards the windscreen.

Humidity detector for detecting fogging on a window

The A/D-converter with optional analog preprocessing comprises two analog inputs (I , I ), wherein a converter ( ) is connected to each input for generating a first and a second digital value (D , D ) respectively. These are fed to a table ( ) for generating a lookup value (D). A decimation filter ( ) processes several such lookup values and generates an output value (O). With this arrangement the table can be kept comparatively small while it is still possible to reach high resolution and precision. The A/D-converter is especially suited for applications where two or more analog signals have to be combined and digitized.

A/D-converter with lookup table

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Zurich, Switzerland

Urs Rothacher