Orbotech Limited

Uri Gold

Ram Oron

Ilia Lutsker

Tally Gilat-Bernshtein

Ofer Fogel

Tamir Margalit

Mordechay Silberberg

Edward Baranovsky

Manuela Hod

Ronen Yogev

Ben-Zion Lavi

Eli Parente

A direct imaging system includes an ultraviolet radiation source, which is configured to irradiate a first area, having a first width, of a layer of a photoreactive material on a substrate with patterned ultraviolet radiation. A thermal energy source is configured to heat a second area of the layer of the photoreactive material while the ultraviolet radiation source irradiates the first area. The second area contains a part of the first area and having a second width less than the first width.

Enhancing efficiency of resist patterning

Optical apparatus includes a mount, which holds a workpiece. An array of optical heads project respective patterns of radiation onto the workpiece. A calibration assembly captures images of the respective patterns. A motion assembly, on which the calibration assembly is mounted, transports the calibration assembly among a plurality of different positions between the array of the optical heads and the mount so as to intercept and image, at each of the different positions, a respective pattern projected by a different one of the optical heads. A processor processes the images captured by the calibration assembly at the different positions so as to monitor operation of the apparatus.

Calibration of a direct-imaging system

An LED-based high power uniform light engine including an array of LEDs having a common anode and a fill factor which exceeds 0.85, the common anode having heat spreading functionality and an active heat sink which is thermally connected to the common anode.

Light engine

This invention discloses a method for determining a location of a border in a color image, the image comprising at least two color populations, between a first color region associated with a first one of the two color populations and a second color region associated with a second one of the two color populations, both the first color region and the second color region being comprised in the color image, the method includes identifying an approximate border location between the first color region and the second color region, determining a plurality of candidate border locations between the first color region and the second color region, each of the plurality of candidate border locations being determined by applying a corresponding border location method chosen from among a plurality of border location methods, choosing one method from among the plurality of border location methods as a preferred method, and determining a location of a border between the first color region and the second color region by designating one of the plurality of candidate border locations associated with the preferred method as the border. An automated optical inspection device suitable for inspection of patterned articles is also disclosed.

Optical inspection system

Growing community of inventors

Rishon Lezion, Israel

Uri Gold