Samsung Display Co., Ltd.

Samsung Electronics Co., Ltd.

Samsung Mobile Display Co., Ltd.

Samsung Displayco., Ltd.

Un-Cheol Sung

Beohm-Rock Choi

Jung-soo Rhee

Jung-Yeon Kim

Sang-pil Lee

Hoon Bae Kim

Mu-Hyun Kim

Su-Hwan Lee

Ji-Hye Choi

Sang-Woo Lee

Joo-Hyeon Lee

Young-Rok Song

Hee-Cheol Kang

Jae-Kwang Ryu

Jong-Heon Kim

Hyun-Sook Park

Soo-yeon Lee

Yong-Sup Choi

Yun-Mi Lee

Chang-Mog Jo

Jin-Koo Chung

Young-Mook Choi

Dong-Kyu Lee

Chae-Woong Kim

Beom-Rak Choi

Seong-Min Kim

Jun-Ho Choi

Sung-Hun Lee

Sung-soo Lee

Jung-Bae Song

Jae-kook Ha

Sang-Pil Lee

Dong-Seob Jeong

Jung-Soo Rhee

Beom Rak Choi

A thin film deposition apparatus that can be simply applied to produce large-sized display devices on a mass scale and that improves manufacturing yield. The thin film deposition apparatus includes a deposition source that discharges a deposition material; a deposition source nozzle unit disposed at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; and a patterning slit sheet disposed opposite to the deposition source nozzle unit and including a plurality of patterning slits arranged in a second direction that is perpendicular to the first direction. A deposition is performed while the substrate or the thin film deposition apparatus moves relative to each other in the first direction, and the deposition source, the deposition source nozzle unit, and the patterning slit sheet are formed integrally with each other.

Thin film deposition apparatus

An organic layer deposition apparatus and a method of manufacturing an organic light-emitting display device by using the apparatus. In particular, an organic layer deposition apparatus that is more easily manufactured and is suitable for use in mass production of large substrates while performing high-definition patterning thereon, as well as a method of manufacturing an organic light-emitting display device by using such an apparatus.

Organic layer deposition apparatus and method of manufacturing organic light-emitting display apparatus using the same

An organic light emitting device including a blue subpixel that is larger than a red subpixel and a green subpixel. The red subpixel and the green subpixel have the same layered structure such that the red subpixel and the green subpixel are formed by using the same shadow mask.

Organic light emitting device, method of manufacturing the same, and shadow mask therefor

An organic layer deposition apparatus, a method of manufacturing an organic light-emitting display apparatus by using the same, and an organic light-emitting display apparatus manufactured using the method. The organic layer deposition apparatus includes a conveyer unit including first and second conveyer units, loading and unloading units, and a deposition unit. A transfer unit moves between the first and second conveyer units, and the substrate attached to the transfer unit is spaced from a plurality of organic layer deposition assemblies of the deposition unit while being transferred by the first conveyer unit. The organic layer deposition assemblies include common layer deposition assemblies and pattern layer deposition assemblies.

Organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus using the same, and organic light-emitting display apparatus manufactured using the method

The present invention relates to an organic light emitting device, and the organic light emitting device according to an exemplary embodiment of the present invention includes a blue subpixel that is larger than a red subpixel and a green subpixel. The red subpixel and the green subpixel have the same layered structure such that the red subpixel and the green subpixel are formed by using the same shadow mask.

An organic layer deposition apparatus, a method of manufacturing an organic light-emitting display device by using the same, and an organic light-emitting display device manufactured using the method, and in particular, an organic layer deposition apparatus that is suitable for use in the mass production of a large substrate and enables high-definition patterning, a method of manufacturing an organic light-emitting display device by using the same, and an organic light-emitting display device manufactured using the method.

A method of manufacturing an organic light-emitting display apparatus includes: disposing an organic layer deposition apparatus to be apart from a substrate by a set distance; and depositing deposition material on the substrate while the organic layer deposition apparatus or the substrate is moved relative to the other, the deposition source apparatus including: a deposition source including a first deposition source and a second deposition source stacked on the first deposition source; a deposition source nozzle unit including a second deposition source nozzle unit at a side of the second deposition source to face the substrate and including a plurality of second deposition source nozzles, and a first deposition source nozzle unit at the side of the second deposition source to face the substrate and including a plurality of first deposition source nozzles formed to pass through the second deposition source; and a patterning slit sheet smaller than the substrate.

Method of manufacturing organic light-emitting display apparatus by using an organic layer deposition apparatus having stacked deposition sources

A thin film deposition apparatus, a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus, and an organic light-emitting display device manufactured by using the method. A thin film deposition apparatus for forming a thin film on a substrate includes a first chamber in a vacuum state; first and second stages arranged in parallel in the first chamber wherein the substrate is fixable to at least one of the first and second stages; a mask contactable with the substrate; and a first deposition source and a second deposition source that are movable relative to the first and second stages and are configured to discharge a deposition material onto the substrate.

Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method

A display device and method thereof which minimizes introduction of oxygen and moisture from the outside includes an insulating substrate, a display part formed on the insulating substrate, a cover substrate combined with the insulating substrate, a filler provided between the insulating substrate and the cover substrate, the filler includes a first region and a second region spaced from the first region and formed at a circumference of the first region, and a moisture absorbent formed in a space between the first region and the second region.

Display device and manufacturing method thereof

A thin film deposition apparatus, a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus, and an organic light-emitting display device manufactured using the method. In the thin film deposition apparatus for forming a thin film on a substrate, the apparatus includes a deposition source that discharges a deposition material; a deposition source nozzle unit disposed at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; a patterning slit sheet disposed opposite to the deposition source nozzle unit and including a common deposition region at an end of the patterning slit sheet and a plurality of patterning slits on the other end in a second direction perpendicular to the first direction, where each of the plurality of pattering slits includes a plurality of patterning sub slits that are different in length; and a barrier plate assembly disposed between the deposition source nozzle unit and the patterning slit sheet in the first direction, and including a plurality of barrier plates that partition a deposition space between the deposition source nozzle unit and the patterning slit sheet into a plurality of sub-deposition spaces. The thin film deposition apparatus is separated from the substrate by a predetermined distance. The thin film deposition apparatus and the substrate are movable relative to each other.

A thin film deposition apparatus that is suitable for manufacturing large-sized display devices on a mass scale and that can be used for high-definition patterning, a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus, and an organic light-emitting display device manufactured by using the method. The thin film deposition apparatus includes: a deposition source that discharges a deposition material; a deposition source nozzle unit disposed at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; a patterning slit sheet disposed opposite to the deposition source nozzle unit and including a plurality of patterning slits arranged in the first direction; a first barrier plate assembly including a plurality of first barrier plates that are disposed between the deposition source nozzle unit and the patterning slit sheet in the first direction, and that partition a space between the deposition source nozzle unit and the patterning slit sheet into a plurality of sub-deposition spaces; and a second barrier plate disposed at one side of the patterning slit sheet, wherein an inner part of the second barrier plate is partitioned into a plurality of spaces by a plurality of barrier ribs.

Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the thin film deposition apparatus, and organic light-emitting display device manufactured by using the method

Growing community of inventors

Anyang-si, South Korea

Un-Cheol Sung