Average Co-Inventor Count = 4.00
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Steag Rtp Systems Gmbh (1 from 31 patents)
2. Steag Ast (1 from 6 patents)
3. Centrotherm Photovoltaics Ag (12 patents)
2 patents:
1. 6005226 - Rapid thermal processing (RTP) system with gas driven rotating substrate
2. 5870526 - Inflatable elastomeric element for rapid thermal processing (RTP) system