Bruker Nano Gmbh

Ulrich Waldschläger

Roald Alberto Tagle Berdan

Thomas Baumann

A method for scanning a sample by means of X-ray optics for irradiating the sample with X-rays, comprises the following steps:

Method for scanning a sample by means of X-ray optics and an apparatus for scanning a sample

The present invention relates to an X-ray fluorescence, XRF, spectrometer, for measuring X-ray fluorescence emitted by a target, wherein the XRF spectrometer comprises an X-ray tube with an anode to emit a divergent X-ray beam, a capillary lens that is configured to focus the divergent X-ray beam on the target, an aperture system that is positioned between the anode of the X-ray tube and the capillary lens and comprises at least one pinhole, and a detector that is configured for detecting X-ray fluorescence radiation emitted by the target, wherein the at least one pinhole is configured for being inserted into the divergent X-ray beam and for reducing a beam cross section of the divergent X-ray beam between the anode and the capillary lens. The present invention further relates to an aperture system for a spectrometer, to the use of an aperture system for adjusting the focal depth of a spectrometer and to a method for adjusting the focal depth of as spectrometer.

X-ray fluorescence spectrometer

The invention relates to a device () for the spatial alignment of X-ray optics () with an entry point () and an exit point (). The device () comprises a parallel displacement mechanism () for gauging the entry point () of the X-ray optics () to a first predetermined point () by parallel displacement of the X-ray optics (). Further, the device () comprises a goniometer mechanism () for gauging the exit point () of the X-ray optics () to a second predetermined point () by at least approximate pivoting of the X-ray optics () around the entry point (). Further, the invention relates to an apparatus () which comprises the device () and X-ray optics ().

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Berlin, Germany

Ulrich Waldschläger