Hamamatsu-photonics K.k.

Hamamatsu Photonics Kabushiki Kaisha

Ulrich Starker

Helmut Teichmann

Dietmar Hiller

Katsumi Shibayama

Tomofumi Suzuki

Takafumi Yokino

Masashi Ito

Seiichiro Mizuno

Takashi Iida

Mitsuaki Kageyama

Seiichiro c/o Hamamatsu Photonics KK Mizuno

Katsumi c/o Hamamatsu Photonics KK Shibayama

Mitsuaki c/o Hamamatsu Photonics KK Kageyama

In the spectroscopy module, a light detecting elementis provided with a light passing openingthrough which light made incident into a body portionpasses. Therefore, it is possible to prevent deviation of the relative positional relationship between the light passing openingand a light detection portionof the light detecting element. Further, an optical element, which guides light made incident into the body portion, is arranged at the light passing opening. Therefore, light, which is to be made incident into the body portion, is not partially blocked at a light incident edge portion of the light passing opening, but light, which is to be made incident into the body portion, can be guided securely. Therefore, according to the spectroscopy module, it is possible to improve the reliability.

Spectroscopic module

A photodiode array, having a plurality of photodiodes(n-type channel regions), and a light entrance portion, formed of an opening that is used to make light to be detected by photodiodesenter, are provided in a substrateof a photodetectorA having an n-type substrateand a p-type epitaxial layer. Furthermore, a carrier capturing portion, for capturing carriers generated at a substrate portion near the light entrance portionand removes the captured carriers to the exterior via an electrode, is arranged from a layer portion of the epitaxial layerthat is positioned between the photodiode arrayand the light entrance portion. A photodetector of a simple arrangement, which, when applied to a spectrometer, enables the positioning precision of components of the spectrometer to be improved, and a spectrometer using this photodetector are thus realized.

Photodetector and spectrometer using the same

The spectroscopy moduleis provided with a body portionfor transmitting light L, L, a spectroscopic portionfor dispersing light Lmade incident from the front planeof the body portioninto the body portionto reflect the light on the front plane, a light detecting elementhaving a light detecting portionfor detecting the light Ldispersed and reflected by the spectroscopic portionand electrically connected to a wiringformed on the front planeof the body portionby face-down bonding, and an underfill materialfilled in the body portionside of the light detecting elementto transmit the light L, L. The light detecting elementis provided with a light-passing holethrough which the light Ladvancing into the spectroscopic portionpasses, and a light incident openingof the light-passing holeis partially covered by a light transmitting plate

In the spectroscopy module, a light absorbing layerhaving a light-passing holethrough which light Ladvancing into a spectroscopic portionpasses and a light-passing holethrough which light Ladvancing into a light detecting portionof a light detecting elementpasses is integrally formed by patterning. Therefore, it is possible to prevent deviation of the relative positional relationship between the light-passing holeand the light-passing hole. Further, since the occurrence of stray light is suppressed by the light absorbing layerand the stray light is absorbed, the light detecting portionof the light detecting elementcan be suppressed from being made incident. Therefore, according to the spectroscopy module, it is possible to improve the reliability.

The spectroscopy moduleis provided with a body portionfor transmitting light L, L, a spectroscopic portionfor dispersing light Lmade incident from the front planeof the body portioninto the body portionto reflect the light on the front plane, a light detecting elementhaving a light detecting portionfor detecting the light Ldispersed and reflected by the spectroscopic portionand electrically connected to a wiringformed on the front planeof the body portionby face-down bonding, and an underfill materialfilled in the body portionside of to the light detecting elementto transmit the light L, L

The spectroscopy module is provided with a body portion for transmitting light, a spectroscopic portion for dispersing light made incident from the front plane of the body portion into the body portion to reflect the light on the front plane, a light detecting element having a light detecting portion for detecting the light dispersed and reflected by the spectroscopic portion and electrically connected to a wiring formed on the front plane of the body portion by face-down bonding, and an underfill material filled in the body portion side of the light detecting element to transmit the light. The light detecting element is provided with a light-passing hole through which the light advancing into the spectroscopic portion passes, and a reservoir portion is formed on a rear plane of the body portion side in the light detecting element so as to enclose a light outgoing opening of the light-passing hole.

Since a spectroscopic module () has a plate-shaped body section (), the spectroscopic module can be reduced in size by reducing the thickness of the body section (). Moreover, since the body section () is plate-shaped, the spectroscopic module () can be manufactured, for example, by using a wafer process. More specifically, by providing lens sections (), diffraction layers (), reflection layers () and light detecting elements () in a matrix form on a glass wafer which becomes many body sections () and dicing the glass wafer, many spectroscopic modules () can be manufactured. This enables easy mass production of spectroscopic modules ().

Alignment marks, andare formed on the flat planeof the peripheral edge portionformed integrally with the diffracting layer, and when the lens portionis mounted onto the substrate, these alignment marksandare positioned to the substrate, thereby making exact alignment of the diffracting layerwith respect to the light detecting portionof the light detecting element, for example, not by depending on a difference in curvature radius of the lens portion. In particular, the alignment marksandare formed on the flat plane, thereby image recognition is given to exactly detect positions of the alignment marksand, thus making it possible to make exact alignment.

Spectroscopy module

Alignment marks, andare formed on the flat plane 11of the peripheral edge portionformed integrally with the diffracting layer, and when the lens portionis mounted onto the substrate, these alignment marksandare positioned to the substrate, thereby making exact alignment of the diffracting layerwith respect to the light detecting portionof the light detecting element, for example, not by depending on a difference in curvature radius of the lens portion. In particular, the alignment marksandare formed on the flat plane, thereby image recognition is given to exactly detect positions of the alignment marksand, thus making it possible to make exact alignment.

A spectrometerA is made up of: an optical bodywithin which a light separation path is set along which an object light to be separated propagates; a light entry slitthrough which the object light enters; a diffraction gratingfor spectrally separating the incident object light; and a photodiode arrayfor detecting the object light separated by the diffraction grating. As an optical member for optically interconnecting the optical bodyand the photodiode array, an optical connection memberis provided, with its light entry surfacefor the separated object light in contact with the upper surfaceof the optical body, with its light exit surfacein contact with the photodiode array, with the light exit surfacetilted by a specified angle relative to the light entry surface. Thus, the spectrometer capable of bringing about sufficient accuracy of placing optical elements in a simple constitution while bringing down cost is realized.

Spectrometer

A spectrometer is configured by using a photodetectorB which comprises a semiconductor substratehaving an upper surface, a photodiode arrayhaving a plurality of photodiodesaligned on the upper surfaceof the substrate, and a light input sectionincluding an opening formed in a predetermined positional relationship to the photodiode array; and a main bodyhaving a plate portionand support portionsandmounted on the substrateof the photodetectorB. The spectrometer is provided with a lensprotruded from a lower faceof the plate portionand a planar aberration-reduced blazed reflection diffraction gratingprovided on an upper faceof the plate portionfor separating incident light having entered through the light input sectionand passed through the lensinto its spectral components, and configured to detect the spectral components with the photodiode array. Thus, a photodetector capable of improving the positioning accuracy of components when it is applied to a spectrometer and the spectrometer using the same are realized.

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Zurich, Switzerland

Ulrich Starker