Edwards Japan Limited

Societe De Mecanique Magnetique

Skf Canada Limited

Societe De Macanique Magnetique

Ulrich Schroder

Eduardo Carrasco

Benoit Henry

Luc Baudelocque

Satoshi Okudera

Shinichi Nomura

Udell So

Matthew Nesbitt

Bertrand Barbey

A vacuum pump including a pump main unit and a control unit is disclosed. The control unit includes a substrate having electronic elements mounted thereon and terminal pins soldered to the substrate at a first end edge of the substrate. The substrate is mounted to a plate via an attachment near a second end edge opposing the first end edge and the plate is mounted to the pump main unit. The terminal pins extend through the plate. Upon linear thermal expansion of the terminal pins, by reason of the location of the terminal pins near the first end edge and the attachment near the second end edge, stresses in the soldered pin connections are reduced. A molding material having a Shore hardness of less than 50, is molded around the electronic elements on the substrate in one embodiment.

Reducing the influence of thermal expansion of connector pins on a substrate in a vacuum pump

A sensor assembly includes an annular target body disposed about a rotatable member outer surface and an annular angular position indicator with at least one angular position index corresponding to an angular position of the member. Radial displacement sensors are spaced circumferentially about the axis and radially outwardly from the target body outer surface. A reference sensor is disposed circumferentially between two of the radial displacement sensors, has an inner end spaced outwardly from the target body surface by a first spacing distance, and is configured to detect the target body. An angular displacement sensor is spaced axially from the reference sensor and has an inner end spaced outwardly from the position indicator surface by a second spacing distance. The angular sensor is located such that the second spacing distance is generally equal to the first spacing distance and such that the position index passes the sensor inner end.

Combined radial position and speed sensor assembly

A vacuum pump having substrates which can be wired together easily and cooled easily. A substrate unit structure is formed by covering the opening of the casing of the pump main unit with a plate functioning also as the casing of the control unit. Pins of a terminal fixed while penetrating the plate are soldered directly to an active magnetic bearing (AMB) control substrate and an aerial connection substrate in order to integrate these components. The casing and sealing structures can be of simple construction. A drip-proof structure can be made with the terminal at low cost without using expensive drip-proof connectors. Further, by cooling the plate, electronic components mounted respectively on the AMB control substrate in a vacuum atmosphere and the aerial connection substrate in an air atmosphere can be cooled simultaneously.

Vacuum pump

Provided are a compact and low-cost motor driver circuit capable of achieving an appropriate brake time and restraining heat generated by a regenerative resistance within a specific temperature range without employing a regenerative resistance having a greater capacity, a heat sink, or a FAN generating a larger volume of air, and a vacuum pump having the motor driver circuit. Regenerative current is controlled so that a speed characteristic gradually approaches inclination 'a' from inclination 'b' depending on the motor speed in the initial stage of regeneration. In addition, a limit is set not to pass further current when the regenerative current reaches a maximum brake current value I. As stated above, when the motor is braked, control is performed so that the initial brake current value at the maximum rated speed is set low and the brake current is increased as the rotational speed decelerates.

Motor driver circuit and vacuum pump having the motor driver circuit

Growing community of inventors

Saint Marcel, France

Ulrich Schroder