International Business Machines Corporation

Ulrich Kunzel

Georg Kraus

Holger Hinkel

Gerhard Kaus

Erhard Max

Reinhold Muehl

Michael Glatzel

Annelie Monnich

The magnetic disc comprises a magnetizable layer (1) to which an adhesion promoting layer (4) and thereto a lubricant film (5) are applied. Onto the substrate of the magnetic head (2) an adhesion reducing layer (9) is deposited. The apparatus can also show only one adhesion-influencing layer. The layers (4) and (9) are formed by the reaction of a sililating agent with reactive groups on the surface of the magnetizable layer (1), or of the substrate of the magnetic head (2), respectively. The sililating agents used differ in their terminal groups of which one category produce van der Waals bonds to the lubricant molecules, and the other is chemically indifferent relative to the lubricant molecules. The two layers (4) and (9) are made e.g. by the spin-coating of a solution of the sililating agent, and subsequent drying. The apparatus ensures a homogeneous coating of the magnetizable layer (1) with lubricant, and it prevents the pick-up of lubricant by the substrate of the magnetic head (2).

Apparatus comprising a lubricant-coated magnetic disc and a magnetic

A plasma reactor comprises a reaction chamber having two plate-shaped electrodes arranged parallel to and above each other, whereby the substrates are supported on the lower electrode and this electrode is additionally provided with a center opening (5) through which gas is fed into the electrode space or which is evacuated from it, and where (a) the upper electrode is connected to a high frequency AC or RF voltage and (b) which has no electrode material in the regions opposite the substrates and (c) where their position and shape are determined by the substrates on the lower electrode, causing the electric field in the electrode space to be selectively weakened at at least above the substrates.

Plasma reactor for etching and coating substrates

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Kusterdingen, Germany

Ulrich Kunzel