Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V.

Huawei Technologies Co., Limited

Ulrich Hofmann

Joachim Janes

Marten Oldsen

Frank Senger

Hans-Joachim Quenzer

Manfred Weiss

Thomas Von Wantoch

Hans Joachim Quenzer

Christian Mallas

Bernd Wagner

Vanessa Stenchly

Rolf Hagedorn

Torsten Müller

Thomas Lisec

Gunter Fuhr

Alfred Ebberg

Shanshan Gu-Stoppel

Steffen Howitz

Yong Cao

Sascha Mühlmann

Jan Hornung

Lars Ratzmann

Björn Jensen

Winfried Schernus

Oleg Petrak

Aloshious Thottappattu Joy

Fabian Schwarz

Frerk SÖRENSEN

The disclosure relates to an apparatus device for projecting an image on the retina of an eye with a laser projection device, a device for determining the orientation of the eye, and with a tracking unit for tracking the laser beam of the laser projection device according to the determined orientation.

Device apparatus for projecting a laser beam for generating an image on the retina of an eye

The invention relates to a MEMS mirror assembly for detecting a large angular range up to 180&#xb0;, preferably up to 160&#xb0;, and to a method for producing a MEMS mirror assembly. The mirror assembly comprises a carrier substrate (), on which a mirror () vibrating about at least one axis is mounted, a transparent cover (), which is connected in a hermetically sealed manner to the carrier substrate () and which comprises an ellipsoidal dome () having a substantially round base area, and a compensation optical system (), which is arranged in a predefined beam path for an incident beam outside the dome (). The middle of the mirror () lies in the centre point of the dome, and the compensation optical system () collimates the incident beam in such a way that a divergence or convergence of the beam caused by the boundary surfaces of the dome once said beam has exited from the dome () is substantially compensated. The MEMS mirror assemblies are produced by joining a cover wafer and a mirror wafer, which each comprise a plurality of hemispherical domes and mirrors mounted on the carrier substrate. The mirror assemblies are then separated from the joined wafers. The domes of the cover wafer are produced by a glass flow process.

MEMS mirror arrangement for detecting a large angular range

The invention relates to an antenna device having at least one antenna element. The antenna element is implemented so as to emit electromagnetic radiation in a beam direction advantageously at frequencies in the GHz range and/or receive same from a beam direction. In addition, the antenna element is arranged on a carrier element which is arranged relative to a holding element. In addition, the carrier element is movable relative to the holding element.

Antenna device

A converter assembly for converting a primary light into a secondary light includes at least one element which has a light-converting structure with open pores and which is laterally held by a frame. The surfaces of both the light-converting structure as well as of the inner face of the frame are covered with a transparent layer such that each of the afore-mentioned elements forms a region in which a property of the incident light and preferably of the wavelength thereof is changed. In specific embodiments, the converter assembly can be part of display assemblies or of miniaturized components for example. There is also described a method for producing the converter assembly.

Converter for generating a secondary light from a primary light, light-emitting elements which contains such a converter, and method for producing the converter and the light-emitting elements

The invention relates to an appliance for detecting objects in a detection region, with a radiation device for emitting an electromagnetic scanning beam into at least a part of the detection region and with a device for modulating the scanning beam as well as with a detection device for the detection of reflected radiation from at least a part of the detection region and with a device for evaluating the time response of the detected, reflected radiation, in dependence on the modulation of the scanning beam. According to the invention, one can envisage the radiation device comprising a radiation source radiating a diffusion device scattering the radiation at least partly into the detection region, in order to be able to apply an as powerful as possible laser as a t source without endangering the eye safety or the general safety of persons.

Appliance and method for detecting objects in a detection region

The present invention relates to a radiation imaging sensor with at least one detection element, which is implemented on a substrate as a micromechanical resonator and which absorbs the radiation to be detected. The resonator is set into a resonant oscillation with an excitation device and a shift in the resonance frequency of the detection element under exposure to radiation is detected with a detection device. The radiation sensor is characterized by the fact that it comprises a scanning device with a single-axis or multi-axis tiltable scanning element. The facility to tilt the device means that the detection element can be used to detect radiation from different directions. The imaging sensor can be realized in a compact manner and be economically produced.

Radiation imaging sensor

The method according to the invention is used for producing optical components, in particular covers for encapsulating micro-systems, wherein at least one reinforcing element, which is produced before being arranged, is arranged on a first substrate, as a result of which a stack is produced. This stack is heated after being connected to a second substrate, as a result of which the first substrate is deformed such that at least one region, covered by the reinforcing element, of the first substrate is moved and/or is inclined or the first substrate is brought into contact with the reinforcing element. In an alternative method according to the invention, the reinforcing element is arranged on the second substrate, wherein this stack is then connected to the first substrate. The first substrate is subsequently heated and deformed such that a region of the first substrate is brought into contact with the reinforcing element.

Method for producing structured optical components

A microactuator arrangement for the deflection of electromagnetic radiation, with a mirror plate which is suspended on a drive frame in a movable manner about a first rotation axis via spring elements, wherein the drive frame is suspended on a chip frame in a movable manner about a second rotation axis via spring elements, wherein the drive frame is not closed and comprises a recess adjacent to the mirror plate and wherein the chip frame at least in the region of the recess of the drive frame is not closed, in a manner such that a deflected and/or incident beam is not inhibited by the drive frame and the chip frame.

Microactuator arrangement for deflecting electromagnetic radiation

A method for activating a deflection device comprising at least one deflection unit, for a projection device for projecting trajectories upon a projection surface, wherein the deflection device deflects electromagnetic radiation which is directed upon it, for producing trajectories, and the at least one deflection unit is activated by way of an activation signal delivered from a control device, for producing oscillations in each case with a turning amplitude at a direction change of the oscillation, about at least one deflection axis, wherein in the case of resonance, the oscillations have a maximal amplitude, at which the produced trajectories reach an edge of the projection surface. The activation signal is set in a manner such that the turning amplitude of the oscillations at least temporarily has a predefined value outside a region of the maximal amplitude of the oscillations, and an intensity distribution of the produced trajectories on the projection surface is achieved with a predefined intensity pattern. The document moreover relates to a deflection device as well as to a projection device.

Method for activating a deflection device for a projection device, a deflection device for a projection device, and a projection device

What is proposed is: a micromirror arrangement which comprises: a first spring-mass oscillator, which has an oscillatory body forming a mirror plate () and first spring elements (); a second spring-mass oscillator, which has a drive plate () and second spring elements () and which is connected to a carrier arrangement () via the second spring elements (), wherein the first spring-mass oscillator is suspended in the second spring-mass oscillator via the first spring elements (); and a drive arrangement (), which is assigned to the drive plate and is designed to cause the drive plate () to oscillate. The oscillatory body () is suspended, movably on two axes, via the first spring elements () on the drive plate (), and the drive plate () is connected, movably on two axes, to the carrier arrangement (), wherein the drive arrangement () is embodied as a two-axis drive and is designed to drive the drive plate () on two axes such that the oscillatory body () oscillates on two axes at in each case one of its orthogonal eigenmodes or close to this eigenmode.

Micromirror arrangement

A micromirror system that includes a chip frame, at least one spring element, and at least one mirror plate oscillatorily suspended in the chip frame via the at least one spring element. The chip frame and the at least one spring element include at least one microchannel which is provided with an inlet opening and an outlet opening for leading through a flowing coolant.

Micromirror system and method of manufacturing a micromirror system

The invention relates to an MEMS structure with a stack made of different layers and a spring-and-mass system varying in its thickness which is formed of the stack, and wherein, starting from a back side of the stack and the substrate, at laterally different positions, the substrate while leaving the first semiconductor layer, or the substrate, the first etch-stop layer and the first semiconductor layer are removed, and to a method for manufacturing such a structure.

Device comprising a spring and an element suspended thereon, and method for manufacturing same

The invention relates to a deflection device for a projection apparatus for projecting Lissajous figures onto an observation field which is made to deflect a light beam about at least one first and one second deflection axis for generating Lissajous figures having a deflection unit for producing oscillations about the deflection axes and having a control apparatus for producing control signals for the deflection unit having a first and second control frequency which substantially corresponds to the resonant frequencies of the deflection unit, wherein the deflection unit has a quality factor of &#x3e;3,000 and the control apparatus includes a feedback loop which is configured to regulate the first and/or second control frequencies in dependence on a measured phasing of the oscillations of the deflection unit so that the maximum amplitude of the oscillations remains in the resonant range of the deflection unit. The invention further relates to a projection apparatus having such a deflection device as well as to a method for controlling a corresponding deflection device.

Deflection device for a projection apparatus, projection apparatus for projecting an image and method for controlling a deflection apparatus for a projection apparatus

The invention relates to a micromechanical resonator arrangement, in particular micro-mirror scanner with an inner actuator, which comprises an oscillation body capable of oscillation about at least one axis, and with an outer actuator with an oscillating part. The inner and outer actuator form a coupled oscillation system, and the outer actuator is driven by an external drive whose drive frequency is selected in a manner such that the oscillation body of the inner actuator oscillates with one of its eigenmodes or close to this eigenmode. The inner actuator is at least one vacuum-encapsulated micro-actuator chip which is fastened on the oscillating part of the outer actuator.

Micromechanical resonator arrangement

A deflection device for a scanner with Lissajous scanning includes a micromirror that oscillates in at least two deflection axes and that includes a frame and a mirror plate that is movably arranged via a suspension mount. The deflection device also includes a control device for generating control signals for a resonant operation of the micromirror in the at least two deflection axes. The suspension mount includes at least one spring connected at one end to the mirror plate and at the other end to the frame. The frequencies of the control signals for the resonant operation of the micromirror are substantially equal in the at least two deflection axes, but differ at least in terms of the predefined scanning repetition rate. The levels of the resonance frequencies of the deflection axes and control signals are determined by a predefined scanning resolution and a predefined scanning repetition rate.

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Itzehoe, Germany

Ulrich Hofmann