Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V.

Von Ardenne Anlagentechnik Gmbh

Von Ardenne Anlagentechnik Gmgh

Ulf Seyfert

Hans-Juergen Heinrich

Siegfried Panzer

Siegfried Schiller

Goetz Grosser

Olaf Roeder

Reinhard Jaeger

Goetz Teschner

Sven Haehne

Olaf Roder

Peter Botzler

Robert Mohs

A sealing device for a rotary feedthrough for receiving a rotating machine element whose outer side can be applied to another machine element, includes at least two sealing elements disposed in tandem in the axial direction of the machine element. Inner sides of the sealing elements are configured for forming an active sealing connection with the rotating machine element. At least one of the sealing elements can be pressurized with an additional force acting in the radial direction so that the force of compression acting on the rotating machine element for the at least one of the sealing elements can be adjusted relative to the force of compression acting on the rotating machine element due to at least one other sealing element.

Sealing device for rotary feedthrough

To achieve an improved end block, in which heating by induction eddy currents, which may occur during AC sputtering, for example, is significantly reduced relative to known end blocks, an end block for a magnetron configuration having a rotating target comprises an end block housing having an attachment surface for attaching the end block on a support apparatus, a pivot bearing for rotatable mounting of the rotating target, and at least one current conduction apparatus which conducts current through the end block housing in operation of the end block. The end block housing is implemented so that each current path in the end block housing which encloses the current conduction apparatus has an interruption at least one point.

Endblock for a magnetron device with a rotatable target

An end block for a magnetron device having a rotatable target comprises an end block housing having a pivot bearing. The end block housing is adapted on its outer side for attachment on a support unit, and the pivot bearing is adapted on an end that is accessible from outside the end block housing, for connection to the rotatable target. The end block housing is movably attached on the support unit. A vacuum coating apparatus has a vacuum chamber, a magnetron device situated in the vacuum chamber, and a rotatable target rotatably mounted on at least one such end block.

End-block for a magnetron device with a rotatable target, and vacuum coating apparatus

Electron gun with band-shaped beams that includes a vacuum chamber extend in a longitudinal direction, a beam window running in the longitudinal direction along the vacuum chamber, and a cathode control-electrode system positioned within the vacuum chamber in the longitudinal direction. The cathode control-electrode system includes at least one substantially straight cathode positioned substantially parallel to a longitudinal axis of the cathode control-electrode system and the at least one substantially straight cathode has bulges formed at defined distances. The bulges are shaped to produce a substantially homogeneous current density distribution along the at least one substantially straight cathode and support units are located in the cathode control-electrode system to correspond with the bulges. The bulges are removably couplable to the support units.

Cathode for electron gun with band-shaped beams

Electron beam exit window

Growing community of inventors

Dresden, Germany

Ulf Seyfert