Commissariat &#xc0; L'&#xc9;nergie Atomique Et Aux &#xc9;nergies Alternatives

Ujwol Palanchoke

Salim Boutami

Stefan Landis

Jerome Hazart

Stephane Pocas

Wilfried Rabaud

Sébastien Berard-Bergery

A multispectral filter matrix for an electromagnetic wave, the matrix including at least a first and a second optoelectronic element, each optoelectronic element including a colour filter and a photoelectric transducer facing the filter, each colour filter forming a Fabry-Perot cavity including a first reflective layer, a second reflective layer and a Fabry-Perot cavity layer of dielectric material between the first reflective layer and the second reflective layer, the layer of dielectric material including a lower surface, in contact with the first reflective layer; the lower surface being curved, an upper surface in contact with the second reflective layer, the upper surface being curved, the average thicknesses of the two layers of dielectric material of the two filters being different.

Multispectral filter matrix with curved Fabry-Perot filters and methods for manufacturing the same

A method for sizing a greyscale lithography mask is disclosed. The mask includes first opaque zones, being opaque to light-exposing radiation, located in first pixels forming a first mask grating. A first target density of a first surface density of first opaque zones is first established. This first target density makes it possible to expose a resin to light over a first given target thickness when it is exposed to the radiation through the first grating. The dimensions of the first pixels and the dimensions of the first opaque zones are then established, such that the value of an error over the first target thickness is less than a first given threshold. The dimensions obtained for the sizing of the first mask grating are used.

Method for sizing a gray scale lithography mask

A bolometric detector of LWIR wavelengths, including:

Bolometric detector with MIM structures of different dimensions

Spectral filtering device including a dielectric substrate, a first filter capable of acting as a passband filter in the visible range and having a plurality of first nanostructures with a uniform spacing between each other. Each nanostructure has a portion of dielectric material arranged between two portions of metallic material such that one of the two portions of metallic material is arranged between the substrate and the portion of dielectric material. A second filter capable of acting as a passband filter in the infrared range is also included having a plurality of second nanostructures with a uniform spacing between each other and each comprising a portion of dielectric material of which only one face is in contact with a portion of metallic material.

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Marseilles, France

Ujwol Palanchoke