Robert Boschgmbh

Udo-Martin Gomez

Burkhard Kuhlmann

Reinhard Neul

Johannes Classen

Joerg Hauer

Wolfram Bauer

Rainer Willig

Christoph Lang

Kersten Kehr

Axel Franke

Jochen Franz

Christian Doering

Udo Bischof

Daniel Christoph Meisel

Torsten Ohms

Oliver Kohn

Michael Veith

Markus Lutz

Karsten Funk

Mathias Reimann

Michael Fehrenbach

Gerhard Wucher

Andreas Thomae

Siegbert Goetz

Jens Frey

Dieter Maurer

Ermin Esch

Matthias Meier

Hans-Dieter Schwarz

Franz Laermer

Frank Schatz

Hans Artmann

Horst Muenzel

Thorsten Pannek

Thorsten Balslink

Markus Ulm

Helmut Sautter

Harald Emmerich

Juergen Graf

Carsten Geckeler

Dietmar Krieg

Emma Abel

Buckhard Kuhlmann

Marco Quander

Burhard Kuhlmann

Marko Rocznik

A yaw rate sensor () includes a movable mass structure () and a drive component () which is suitable for setting the movable mass structure () in motion (), and an analysis component () which is suitable for detecting a response () of the movable mass structure () to a yaw rate (&#x3a9;). A method for functional testing of a yaw rate sensor () includes the following steps: driving a movable mass structure (), feeding a test signal () into a quadrature control loop () at a feed point () of the quadrature control loop (), feeding back a deflection () of the movable mass structure (), detecting a measure of the feedback of the movable mass structure (), and reading out the response signal () from the quadrature control loop (). In the yaw rate sensor () and also in the method, the readout of the response signal () in relation to a processing direction () of the test signal () is provided between a feed point () for a test signal () and an actuator () for feeding back a deflection () of the movable mass structure ().

Self-test for yaw rate sensors

A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.

Yaw-rate sensor

A yaw rate sensor includes a drive mass element which is situated above a surface of a substrate and is drivable to vibrate by a drive device along a first axis extending along the surface, having a detection mass element, which is deflectable under the influence of a Coriolis force along a second axis perpendicular to the surface, and having a detection device by which the deflection of the detection mass element along the second axis is detectable. Due to the arrangement of the second axis perpendicular to the surface, the yaw rate sensor may be integrated into a chip together with additional yaw rate sensors suitable for detection of rotations about axes of rotation in other directions.

Yaw rate sensor

A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, where the movable substructures are excitable into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, where deflections of the Coriolis elements induced by a Coriolis force are detectable, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.

A device for controlling a device by using a rotation-rate sensor. In order to provide a device for determining a triggering signal for a safety device which allows a particularly compact implementation of the device, the device is set up to ascertain an acceleration variable on the basis of a first sensor signal for a first seismic mass of the rotation-rate sensor and the second sensor signal for a second seismic mass of the rotation-rate sensor and to control the device as a function of the acceleration variable.

Method for controlling a device and a device for controlling the device

A yaw rate sensor includes a substrate which has a main plane of extension and a Coriolis element which is movable relative to the substrate. The yaw rate sensor has an excitation arrangement for exciting a drive oscillation of the Coriolis element along a first direction parallel to the main plane of extension. The yaw rate sensor has a detection arrangement for detecting a Coriolis deflection of the Coriolis element along a third direction which is perpendicular to the main plane of extension. In addition, the yaw rate sensor has a quadrature compensation structure which includes a comb electrode structure and a plate capacitor structure.

Yaw rate sensor and method for operating a yaw rate sensor

A component having an acceleration sensor having at least one freely oscillatory mass, and a resonator having at least one resonating structure, in which the at least one freely oscillatory mass of the acceleration sensor and the at least one resonating structure of the resonator are disposed on and/or in one chip. A corresponding production method for a component is also described.

Component and production method for a component

A delta sigma modulator includes an oscillatory system having a natural frequency and an electronics and a control loop which acts upon the electronics from the oscillatory system and again upon the oscillatory system from the electronics. The control loop provides that a gain in the control loop demonstrates a peaking in a frequency range around the natural frequency of the oscillatory system.

Delta sigma modulator

A micromechanical motion sensor is capable of detecting a deflection imparted to an oscillatably mounted bar spring element excited to a permanent periodic oscillation by an electrostatic oscillating drive to which a periodic drive voltage is applied. To compensate non-linearities of the resonance frequency response of the bar spring element, a sum of a normal drive voltage signal and a compensation drive signal may be applied to a comb drive. In an alternative embodiment, separate compensation comb drive units may be additionally provided to the comb drive units used for the oscillation drive and a compensation voltage signal may be applied to them to compensate for the non-linearity.

Micromechanical motion sensor

A microstructured component having a layered construction may allow implementation of component structures having a layer thickness of more than 50 &#x3bc;m, e.g., more than 100 &#x3bc;m. Capping of the component structure may allow vacuum enclosure of the component structure with a hermetically sealed electrical connection. The layered construction of the microstructured component includes a carrier including at least one glass layer, e.g., a PYREX&#x2122; layer, a component structure, arranged in a silicon layer, which is bonded to the glass layer, and a cap, which is positioned over the component structure and is also bonded to the glass layer.

Microstructured component and method for its manufacture

A micromechanical rotation rate sensor has a seismic mass and driving devices which cause a driving vibration of the seismic mass in a first direction x. The rotation rate sensor has measuring devices which measure a deflection of the seismic mass in a second direction y, and generate a deflection signal. The deflection includes a measurement deflection caused by a Coriolis force and an interference deflection, the interference deflection being phase-shifted with respect to the measurement deflection by 90&#xb0;. Compensation devices are provided at the seismic mass to reduce the interference deflection. Regulation devices are provided, to which the deflection signal is supplied as an input variable, which demodulate an interference deflection signal from the deflection signal, and which generate a compensation signal from the interference deflection signal, which is supplied to the compensation devices.

Micromechanical rotation rate sensor having error suppression

A rotation rate sensor having a substrate and a Coriolis element is proposed, the Coriolis element being situated above a surface of a substrate; the Coriolis element being able to be induced to vibrate in parallel to a first axis (X); an excursion of the Coriolis element being detectable, based on a Coriolis force in a second axis (Y), which is provided to be essentially perpendicular to the first axis (X); the first and second axes (X, Y) being provided parallel to the surface of the substrate, wherein force-conveying means are provided, the means being provided to convey a dynamic force effect between the substrate and the Coriolis element.

Rotation rate sensor

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Leonberg, Germany

Udo-Martin Gomez