Robert Boschgmbh

Udo Gomez

Markus Lutz

Christoph Lang

Burkhard Kuhlmann

Karsten Funk

Reinhard Neul

Jochen Franz

Vladimir Petkov

Joerg Hauer

Wolfram Bauer

Christian Doering

Rainer Willig

Udo Bischof

Michael Fehrenbach

Andreas Thomae

Gerhard Wucher

Siegbert Goetz

Systems and methods are described below for cancelling low frequency errors in electronic systems including MEMS systems. The systems include a first circuit coupled to one or more switches. One or more bond wires are coupled to the switches and a second circuit. Control signals are coupled to the switches, and the control signals are configured to control coupling of the first circuit to the second circuit via the switch to cancel variable offsets introduced by the bond wire in an output of the first circuit.

Cancelling low frequency errors in MEMS systems

A yaw-rate sensor is proposed having a first and a second Coriolis element ( ) which are arranged side-by-side above a surface ( ) of a substrate. The Coriolis elements ( ) are induced to oscillate parallel to a first axis. Due to a Coriolis force, the Coriolis elements ( ) are deflected in a second axis which is perpendicular to the first axis. The first and second Coriolis elements ( ) are coupled by a spring ( ) which is designed to be yielding in the first and in the second axis. Thus, the frequencies of the oscillations in the two axes are developed differently for the in-phase and antiphase oscillation.

Rotation speed sensor

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Leonberg, Germany

Udo Gomez