Intel Corporation

Uday Shah

Robert S Chau

Brian S Doyle

Jack T Kavalieros

Justin K Brask

Mark L Doczy

Ravi Pillarisetty

Suman Datta

Matthew V Metz

Elijah V Karpov

Niloy Mukherjee

Marko Radosavljevic

Charles C Kuo

Prashant Majhi

Willy Rachmady

Benjamin Chu-Kung

Kaan Oguz

Gilbert W Dewey

David L Kencke

Chris E Barns

Amlan Majumdar

Roksana Golizadeh Mojarad

Been-Yih Jin

Thomas A Letson

Roza Kotlyar

Been Y Jin

James S Clarke

Robert B Turkot, Jr

Han Wui Then

Ibrahim Ban

Satyarth Suri

Annalisa Cappellani

Titash Rakshit

Clair C Webb

Christopher D Thomas

Bruce A Block

Markus Kuhn

Justin Brockman

Ramune Nagisetty

Ryan E Arch

Huiying Liu

Jack Kavalleros

Van H Le

Rafael Rios

Dinesh Somasekhar

Kevin O'Brien

Yih Wang

James M Blackwell

Nick Lindert

Joseph M Steigerwald

Ramanan Chebiam

Tejaswi K Indukuri

Jeffery D Bielefeld

Nancy M Zelick

Anne E Miller

Allen B Gardiner

Aravind S Killampalli

Seiichi Morimoto

Pulkit Jain

Been-Yin Jin

Yong Ju Lee

Jay P Gupta

Surinder P Singh

Roksana Golizadeh Mojard

Rajwinder Singh

Brian S Dovle

Terence Bacuita

Resistive memory cells, precursors thereof, and methods of making resistive memory cells are described. In some embodiments, the resistive memory cells are formed from a resistive memory precursor that includes a switching layer precursor containing a plurality of oxygen vacancies that are present in a controlled distribution therein, optionally without the use of an oxygen exchange layer. In these or other embodiments, the resistive memory precursors described may include a second electrode formed on a switching layer precursor, wherein the second electrode is includes a second electrode material that is conductive but which does not substantially react with oxygen. Devices including resistive memory cells are also described.

Resistive memory cells and precursors thereof, methods of making the same, and devices including the same

An embodiment includes an apparatus comprising: a memory array comprising: a selector switch including top and bottom electrodes, a metal layer, and a solid electrolyte layer; a memory cell in series with the selector switch; bit and write lines, wherein (a) (i) the top electrode couples to one of the bit and write lines and the bottom electrode couples to another of the bit and write lines, and (a) (ii) the memory cell is between one of the top and bottom electrodes and one of the bit and write lines; wherein (b) (i) the metal layer includes silver (Ag), and (b) (ii) Ag ions from the metal layer form a conductive path in the SE layer when the top electrode is biased and disband the conductive path when the top electrode is not biased. Other embodiments Electrode are described herein.

Multilayer selector device with low holding voltage

An embodiment includes an apparatus comprising: first and second electrodes; first and second insulation layers between the first and second electrodes; and a middle layer between the first and second insulation layers; wherein (a) the middle layer includes material that has a first resistance when the first electrode is biased at a first voltage level and a second resistance when the first electrode is biased at a second voltage level; (b) the first resistance is less than the second resistance and the first voltage level is greater than the second voltage level. Other embodiments are described herein.

Multilayer selector device with low leakage current

Heterojunction tunnel field effect transistors (hTFETs) incorporating one or more oxide semiconductor and a band offset between at least one of a channel material, a source material of a first conductivity type, and drain of a second conductivity type, complementary to the first. In some embodiments, at least one of p-type material, channel material and n-type material comprises an oxide semiconductor. In some embodiments, two or more of p-type material, channel material, and n-type material comprises an oxide semiconductor. In some n-type hTFET embodiments, all of p-type, channel, and n-type materials are oxide semiconductors with a type-II or type-III band offset between the p-type and channel material.

Heterojunction TFETs employing an oxide semiconductor

One embodiment provides an apparatus. The apparatus includes a bipolar junction transistor (BJT) and an integrated resistive element. The BJT includes a base contact, a base region, a collector contact, a collector region and an integrated emitter contact. The integrated resistive element includes a resistive layer and an integrated electrode. The resistive element is positioned between the base region and the integrated emitter contact.

Integrated 1T1R RRAM memory cell

An embodiment includes a programmable metallization cell (PMC) memory comprising: a top electrode and a bottom electrode; a metal layer between the top and bottom electrodes; and a solid electrolyte (SE) layer between the metal layer and the bottom electrode; wherein (a) the metal layer includes an alloy of first and second metals, and (b) metal ions from the first metal form a conductive path in the SE layer when the top electrode is positively biased and disband the conductive path when the top electrode is negatively biased. Other embodiments are described herein.

Programmable metallization cell with alloy layer

Embodiments of the present invention include RRAM devices and their methods of fabrication. In an embodiment, a resistive random access memory (RRAM) cell includes a conductive interconnect disposed in a dielectric layer above a substrate. An RRAM device is coupled to the conductive interconnect. An RRAM memory includes a bottom electrode disposed above the conductive interconnect and on a portion of the dielectric layer. A conductive layer is formed on the bottom electrode layer. The conductive layer is separate and distinct from the bottom electrode layer. The conductive layer further includes a material that is different from the bottom electrode layer. A switching layer is formed on the conductive layer. An oxygen exchange layer is formed on the switching layer and a top electrode is formed on the oxygen exchange layer.

RRAM devices and their methods of fabrication

An embodiment includes a memory comprising: a top electrode and a bottom electrode; an oxygen exchange layer (OEL) between the top and bottom electrodes; and an oxide layer between the OEL and the bottom electrode; wherein the oxide layer includes Deuterium and oxygen vacancies. Other embodiments are described herein.

Resistive random access memory with deuterium

Memory cells with improved tunneling magnetoresistance ratio (TMR) are disclosed. In some embodiments such devices may include a magnetoresistive tunnel junction (MTJ) element coupled in series with a tunneling magnetoresistance enhancement element (TMRE). The MTJ element and TMRE may each be configured to transition between high and low resistance states, e.g., in response to a voltage. In some embodiments, the MTJ and TMRE are configure such that when a read voltage is applied to the cell while the MTJ is in its low resistance state the TMRE is driven to is low resistance state, and when such voltage is applied while the MTJ is in its high resistance state, the TMRE remains in its high resistance state. Devices and systems including such memory cells are also disclosed.

Memory cells with enhanced tunneling magnetoresistance ratio, memory devices and systems including the same

An embodiment includes a memory comprising: a top electrode and a bottom electrode; an oxygen exchange layer (OEL) between the top and bottom electrodes; a first oxide layer between the OEL and the bottom electrode; and a second oxide layer between the first oxide layer and the bottom electrode; wherein (a) a first plurality of oxygen vacancies are within the first oxide layer and are adjacent the OEL at a first concentration, (b) a second plurality of oxygen vacancies are within the first oxide layer and are adjacent the second oxide layer at a second concentration that is less than the first concentration, and (c) the first oxide layer includes a first oxide material different from a second oxide material included in the second oxide layer. Other embodiments are described herein.

High retention resistive random access memory

An embodiment includes a resistive random access memory (RRAM) comprising: top and bottom electrodes; first and second oxygen exchange layers (OELs) between the top and bottom electrodes; an oxide layer between the first and second OELs; wherein (a) first oxygen vacancies are within an upper third of the oxide layer at a first concentration, (b) second oxygen vacancies are within a lower third of the oxide layer at a second concentration, and (c) third oxygen vacancies are within a middle third of the oxide layer at a third concentration that is less than either of the first and second concentrations. Other embodiments are described herein.

Techniques are disclosed for forming non-planar resistive memory cells, such as non-planar resistive random-access memory (ReRAM or RRAM) cells. The techniques can be used to reduce forming voltage requirements and/or resistances involved (such as the resistance during the low-resistance state) relative to planar resistive memory cells for a given memory cell space. The non-planar resistive memory cell includes a first electrode, a second electrode, and a switching layer disposed between the first and second electrodes. The second electrode may be substantially between opposing portions of the switching layer, and the first electrode may be substantially adjacent to at least two sides of the switching layer, after the non-planar resistive memory cell is formed. In some cases, an oxygen exchange layer (OEL) may be disposed between the switching layer and one of the first and second electrodes to, for example, increase flexibility in incorporating materials in the cell.

Techniques for forming non-planar resistive memory cells

A non-volatile memory device is disclosed, in which a ballast resistor layer is disposed between the selector element and memory element of a given memory cell of the device. The material composition of the ballast resistor can be customized, as desired, and in some cases may be, for example, a sub-stoichiometric oxide of hafnium oxide (HfO), tantalum oxide (TaO), or titanium dioxide (TiO), or an alloy of any thereof. In accordance with some embodiments, the integrated ballast resistor may serve the function of damping current surge related to the snapback characteristics of the selector element, preserving control of memory element switching. In accordance with some embodiments, an integrated ballast resistor layer provided as described herein may be implemented, for example, in any of a wide range of resistive random-access memory (RRAM) architectures and spin-transfer torque magnetic random-access memory (STTMRAM) architectures, including cross-point implementations of these types of architectures.

Non-volatile memory devices including integrated ballast resistor

A microelectronic device having a functional metal oxide channel may be fabricated on a microelectronic substrate that can be utilized in very large scale integration, such as a silicon substrate, by forming a buffer transition layer between the microelectronic substrate and the functional metal oxide channel. In one embodiment, the microelectronic device may be a microelectronic transistor with a source structure and a drain structure formed on the buffer transition layer, wherein the source structure and the drain structure abut opposing sides of the functional metal oxide channel and a gate dielectric is disposed between a gate electrode and the functional metal oxide channel. In another embodiment, the microelectronic device may be a two-terminal microelectronic device.

Functional metal oxide based microelectronic devices

Growing community of inventors

Portland, OR, United States of America

Uday Shah