Toyo Tanso Co., Ltd.

Mitsui Chemicals, Inc.

Udai Tanaka

Tetsuro Tojo

Hitoshi Takebayashi

Jiro Hiraiwa

Osamu Yoshimoto

Masashi Kodama

Yoshitomi Tada

Atsuhisa Mimoto

Akimasa Tasaka

A fluorine gas generator for generating highly pure fluorine gas in a stable and safe manner by electrolyzing an electrolytic bathcomprising hydrogen fluoride in the form of a molten mixed gas is provided which comprises an electrolytic celldivided, by a partition wallinto an anode chamberin which an anode is disposed and a cathode chamberin which a cathode is disposed, pressure maintenance means for maintaining the anode chamberand cathode chamberat atmospheric pressure, and liquid level sensing meanscapable of sensing the levels of the electrolytic bathin the anode chamberand in the cathode chamberrespectively, at three or more level stages.

Fluorine gas generator

A carbon electrode for producing gaseous nitrogen trifluoride comprising a dense texture with an average pore size of 0.5 &#x3bc;m or less is provided. The carbon electrode contains a carbonaceous material, and 3 to 10 wt % of at least one selected from magnesium fluoride and aluminum fluoride which have a melting point not lower than the baking temperature of the carbonaceous material.

Carbon electrode for generation of nitrogen trifluoride gas

Growing community of inventors

Osaka, Japan

Udai Tanaka