Taiwan Semiconductor Manufacturing Comp. Ltd.

Tzu-Wen Chen

Jian-Yuan Su

Yao-Tang Lin

Ming-Hsin Chen

A reticle includes a border section surrounding a pattern section, and gas openings arranged in and passing through the border section. The gas openings are coupled to a gas supply. Each gas opening extends in a first direction inclined to and forming an angle with a reticle center axis that extends perpendicularly away from a front surface of the reticle, and is configured to blow a pressurized gas in the first direction away from the front surface to create an air wall adjacent to and surrounding the front surface, thereby advantageously preventing particles from falling on the front surface of the reticle.

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Hsinchu, Taiwan

Tzu-Wen Chen