Gudeng Precision Industrial Co., Ltd.

Tzu-Wei Huang

Ming-Chien Chiu

Yung-Chin Pan

Cheng-En Chung

Po-Ting Lee

Wei-Chien Liu

En-Nien Shen

Support for lower cover of reticle box

A supporting shelf module includes a plurality of plastic supporting plates parallelly arranged in a height direction, and at least one pair of metal-made connectors located at two opposite ends of the supporting plates in the height direction. The connectors in one pair are correspondingly located in two horizontal planes perpendicular to the height direction. A wafer container is also disclosed, which includes a container body having at least two sets of the supporting shelf modules mounted therein, at least two top retaining brackets and at least two bottom retaining grooves provided on an inward side of a top and a bottom panel of the container body, respectively. The supporting shelf module has upper ends engaged with the top retaining brackets and lower ends engaged with and limited to the bottom retaining grooves in an engaging direction. Thus, the tolerance problem of the conventional wafer shelf can be solved.

Supporting shelf module and wafer container using same

Support for upper cover of reticle box

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Taipei, Taiwan

Tzu-Wei Huang