Taiwan Semiconductor Manufacturing Comp. Ltd.

Tzu-Ting Liu

Dian-Hau Chen

Chen-Chiu Huang

Liang-Wei Wang

Hung-Chao Kao

Yu-Jen Wang

Chih-Pin Chiu

Chih-Chuan Su

A method for forming a semiconductor memory structure includes forming an MTJ stack over a substrate. The method also includes etching the MTJ stack to form an MTJ device. The method also includes depositing a metal layer over a top surface and sidewalls of the MTJ device. The method also includes oxidizing the metal layer to form an oxidized metal layer. The method also includes depositing a cap layer over the oxidized metal layer. The method also includes oxidizing the cap layer to form an oxidized cap layer. The method also includes removing an un-oxidized portion of the cap layer.

Semiconductor memory structure and method for forming the semiconductor memory structure

Growing community of inventors

Taoyuan, Taiwan

Tzu-Ting Liu