Mosel Vitelic Corporation

Tzu-Hsin Huang

Hua-Jen Tseng

Pei-Wei Tsai

Yung-Tsun Lo

Pang-Cheng Liu

Bruse Lee

Chin-Kun Liu

Min-Huei Lin

An upper lid alignment apparatus for hatchback reaction cabin includes at least three sets of mating members. Each mating member has a protruding active member located on a side wall of an upper lid and a receiving member located on a side wall of a table. The receiving member has a guide slope to guide the active member to slide and reset on an anchor spot on the receiving member. The upper lid hence may make closed contact with the table to form a sealed cabin for reaction process.

Upper lid alignment apparatus for hatchback reaction cabin

A clamp used in clamping semi-conductor wafers during processing operations permits ready release of the wafer and avoids adherence of the clamp to materials deposited onto the wafer which otherwise tend to stick the wafer to the clamp. Adhesion of the deposited materials to the clamp is avoided by providing the clamping surfaces of the clamp with a minimum surface roughness achieved by machining, grinding, etching or other techniques.

Non-sticking semi-conductor wafer clamp and method of making same

An arc chamber including a reaction chamber, a filament element used to generate electrons, a first power supply means set for providing power to the filament element, a second power supply means utilized for creating a potential to increase the ionization efficiency, a plurality of gas injected openings set to inject suitable gas into the reaction chamber and be ionized in a gaseous plasma by impact from electrons, a first filament insulator, and three second filament insulators used for isolation. The first filament insulator includes a truncated corn portion and a ring portion. The truncated corn portion has a hole formed threrethrough itself. The ring portion is coaxially connected to the smaller surface of the truncated corn portion. The second filament insulator includes a truncated corn portion and two ring portions. Similarily, the truncated corn portion has a hole through formed therethrough. The ring portions are respectively coaxially connected to the two surfaces of the truncated corn portion. In the preferred embodiment, three first filament insulators and one second filament insulator are set on the filament element for isolation. The filament insulators are screwed into the filament element and exactly attached on the side wall of the reaction chamber.

Arc chamber for ion implanter

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Hsichu, Taiwan

Tzu-Hsin Huang