Taiwan Semiconductor Manufacturing Comp. Ltd.

Tze-Liang Lee

Chii-Horng Li

Jr-Hung Li

Ming-Hua Yu

Tai-Chun Huang

Kun-Mu Li

Hsueh-Chang Sung

Tsz-Mei Kwok

Ching-Yu Chang

Chien-Hao Chen

Pei-Ren Jeng

Chung-Chi Ko

Yi-Hung Lin

Shih-Chang Chen

Pang-Yen Tsai

Chih-Tang Peng

Yen-Yu Chen

Hao-Ming Lien

Syun-Ming Jang Jang

Chao-Cheng Chen

Chi-Ming Yang

Po-Cheng Shih

Chung-Ting Ko

Li-Ting Wang

Yu-Hung Cheng

Ming-Hui Weng

Yahru Cheng

Tsai-Jung Ho

Kuang-Yuan Hsu

Shing-Chyang Pan

Yen-Ru Lee

Ting-Gang Chen

Chunyao Wang

Mong-Song Liang

Yu-Yun Peng

Su-Jen Sung

Chia-Lin Chen

Chi On Chui

Yung-Cheng Lu

Chun-Feng Nieh

Huan-Just Lin

Shu-Yuan Ku

Tsan-Chun Wang

Yen-Chun Huang

Ling-Yen Yeh

Chan-Lon Yang

Chih-Hao Chen

Yi-Jing Lee

Kuo-Tai Huang

Wan-Yi Kao

Chih-Chien Chi

Chen-Yuan Kao

Yao-Jen Chang

Chi-Chun Chen

Teng-Chun Tsai

Huicheng Chang

Ziwei Fang

Fu-Kai Yang

Li-Te S Lin

Liang-Yin Chen

Su-Hao Liu

Cheng-Tung Lin

De-Fang Chen

Kuo-Ju Chen

Chia-Wei Chang

Yung-Chih Wang

Chien-Hsun Wang

Szu-Ping Tung

Ming-Chang Wen

Chih-Pin Tsao

Yu-Lien Huang

Ming-Ching Chang

Ryan Chia-Jen Chen

Chen-Yu Liu

Yu-Chang Lin

Yi-Nien Su

Chu-Yun Fu

Chyi Shyuan Chern

Zi-Wei Fang

Ming-Jie Huang

Peng-Fu Hsu

Ju-Wang Hsu

Chen-Hua Douglas Yu

Chin-Hsiang Lin

Harry-Hak-Lay Chuang

Chih-Hsin Ko

Bao-Ru Young

Cheng-Hsien Wu

Ming Zhu

Chia-Jen Chen

Shiang-Bau Wang

Joung-Wei Liou

Chia-Ying Lee

Jong-I Mou

Hsien-Hsin Lin

Zhen-Cheng Wu

Yu-Ting Huang

Jong Chen

Jo Fei Wang

Photoresists and methods of forming and using the same are disclosed. In an embodiment, a method includes spin-on coating a first hard mask layer over a target layer; depositing a photoresist layer over the first hard mask layer using chemical vapor deposition or atomic layer deposition, the photoresist layer being deposited using one or more organometallic precursors; heating the photoresist layer to cause cross-linking between the one or more organometallic precursors; exposing the photoresist layer to patterned energy; heating the photoresist layer to cause de-crosslinking in the photoresist layer forming a de-crosslinked portion of the photoresist layer; and removing the de-crosslinked portion of the photoresist layer.

Photoresist and method

Metal-comprising resist layers (for example, metal oxide resist layers), methods for forming the metal-comprising resist layers, and lithography methods that implement the metal-comprising resist layers are disclosed herein that can improve lithography resolution. An exemplary method includes forming a metal oxide resist layer over a workpiece by performing deposition processes to form metal oxide resist sublayers of the metal oxide resist layer over the workpiece and performing a densification process on at least one of the metal oxide resist sublayers. Each deposition process forms a respective one of the metal oxide resist sublayers. The densification process increases a density of the at least one of the metal oxide resist sublayers. Parameters of the deposition processes and/or parameters of the densification process can be tuned to achieve different density profiles, different density characteristics, and/or different absorption characteristics to optimize patterning of the metal oxide resist layer.

In-situ deposition and densification treatment for metal-comprising resist layer

A method of forming a pattern in a photoresist layer includes forming a photoresist layer over a substrate, and reducing moisture or oxygen absorption characteristics of the photoresist layer. The photoresist layer is selectively exposed to actinic radiation to form a latent pattern, and the latent pattern is developed by applying a developer to the selectively exposed photoresist layer to form a pattern.

Photoresist layer surface treatment, cap layer, and method of forming photoresist pattern

A semiconductor device including an etch stop layer and a method of forming is provided. The semiconductor device may include a source/drain region and a gate structure, wherein a first etch stop layer is over a conductive plug to a source/drain region and a second etch stop layer is over the gate structure. The first etch stop layer and the second etch stop layer may have different thicknesses. A dielectric layer may be formed over the first etch stop layer and the second etch stop layer, and contacts may be formed through the dielectric layer and the first and second etch stop layers.

Semiconductor device comprising first etch stop layer over first conductive feature over source/drain region

A semiconductor device includes a first conductive feature, a first dielectric layer over the first conductive feature, a second conductive feature extending through the first dielectric layer, an air gap between the first dielectric layer and the second conductive feature, and an etch stop layer over the second conductive feature and the first dielectric layer. The etch stop layer covers the air gap, and the air gap extends above a bottommost surface of the etch stop layer.

Interconnect structure and method of forming the same

A method of forming a semiconductor device includes: forming a fin protruding above a substrate; forming a metal gate over the fin, the metal gate being surround by a dielectric layer; etching the metal gate to reduce a height of the metal gate, where after the etching, a recess is formed over the metal gate between gate spacers of the metal gate; lining sidewalls and a bottom of the recess with a semiconductor material; filling the recess by forming a dielectric material over the semiconductor material; forming a mask layer over the metal gate, where a first opening of the mask layer is directly over a portion of the dielectric layer adjacent to the metal gate; removing the portion of the dielectric layer to form a second opening in the dielectric layer, the second opening exposing an underlying source/drain region; and filling the second opening with a conductive material.

Hybrid film scheme for self-aligned contact

A device includes a fin structure, a gate structure, a first source/drain epitaxial structure and, a second source/drain epitaxial structure. The fin structure over a substrate and includes a bottom portion protruding from the substrate and a top portion over the bottom portion. An interface between the bottom portion and the top portion comprises oxygen and has an oxygen concentration lower than about 1.E+19 atoms/cm. The gate structure covers the fin structure. The first source/drain epitaxial structure and the second source/drain epitaxial structure are over the top portion of the fin structure and on opposite sides of the gate structure.

Semiconductor device

A representative method includes forming a photo-sensitive material over a substrate, and forming a cap layer over the photo-sensitive material, and patterning the cap layer. Using the patterned cap layer, a first portion of the photo-sensitive material is selectively exposed to a pre-selected light wavelength to change at least one material property of the first portion of the photo-sensitive material, while preventing a second portion of the photo-sensitive material from being exposed to the pre-selected light wavelength. One, but not both of the following steps is then conducted: removing the first portion of the photo-sensitive material and forming in its place a conductive element at least partially surrounded by the second portion of the photo-sensitive material, or removing the second portion of the photo-sensitive material and forming from the first portion of the photo-sensitive material a conductive element electrically connecting two or more portions of a circuit.

Patterning interconnects and other structures by photo-sensitizing method

A method of manufacturing a semiconductor device includes forming a photoresist layer over a substrate and forming a dehydrated film over the photoresist layer. The photoresist layer is selectively exposed to actinic radiation to form an exposed portion and an unexposed portion of the photoresist layer. The photoresist layer is developed to remove the unexposed portion of the photoresist layer and a first portion of the dehydrated film over the unexposed portion of the photoresist layer. In an embodiment, the method includes etching the substrate by using the exposed portion of the photoresist layer as a mask.

Photoresist layer outgassing prevention

A method for forming a semiconductor device includes providing a base device having a top dielectric layer, forming a sacrificial layer on the top dielectric layer, and patterning the sacrificial layer to form openings. The method also includes depositing first protective dielectric layer and a low-K dielectric layer in the opening and performing planarization to form a first planarized structure including sacrificial regions and low k regions separated by a first protective layer. Next, top portions of the low-k dielectric layer are replaced with a second protective dielectric layer to form a second planarized structure that includes enclosed dielectric structures separated by sacrificial regions. The method further includes replacing the remaining portions of the sacrificial layer with a target metal interconnect material to form a third planarized structure that includes metal interconnect material disposed between enclosed dielectric structures.

Semiconductor device and method for manufacturing the same

A semiconductor device and a method of forming the same are provided. The semiconductor device includes a substrate, a gate structure, a dielectric structure and a contact structure. The substrate has source/drain (S/D) regions. The gate structure is on the substrate and between the S/D regions. The dielectric structure covers the gate structure. The contact structure penetrates through the dielectric structure to connect to the S/D region. A lower portion of a sidewall of the contact structure is spaced apart from the dielectric structure by an air gap therebetween, while an upper portion of the sidewall of the contact structure is in contact with the dielectric structure.

Methods of forming semiconductor device

An improved method of forming conductive features and a semiconductor device formed by the same are disclosed. In an embodiment, a method includes providing a first conductive feature in a first dielectric layer; selectively depositing an etch-resistant layer over the first dielectric layer, a sidewall of the etch-resistant layer being coterminous with a sidewall of the first dielectric layer; after selectively depositing the etch-resistant layer, selectively depositing a capping layer over the first conductive feature adjacent the etch-resistant layer, a sidewall of the capping layer being coterminous with a sidewall of the first conductive feature; and forming a second conductive feature over the capping layer, the etch-resistant layer separating the second conductive feature from the first dielectric layer.

Interconnect structures and methods of forming the same

A method of forming a semiconductor device includes forming a photoresist layer over a mask layer, patterning the photoresist layer, and forming an oxide layer on exposed surfaces of the patterned photoresist layer. The mask layer is patterned using the patterned photoresist layer as a mask. A target layer is patterned using the patterned mask layer as a mask.

Method for forming and using mask

A method of forming a semiconductor device includes forming a mask layer over a substrate and forming an opening in the mask layer. A gap-filling material is deposited in the opening. A plasma treatment is performed on the gap-filling material. The height of the gap-filling material is reduced. The mask layer is removed. The substrate is patterned using the gap-filling material as a mask.

Semiconductor device and method

A semiconductor device includes a substrate, a gate structure on the substrate, a source/drain (S/D) region and a contact. The S/D region is located in the substrate and on a side of the gate structure. The contact lands on and connected to the S/D region. The contact wraps around the S/D region.

Semiconductor device, FinFET device and methods of forming the same

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Hsinchu, Taiwan

Tze-Liang Lee