Applied Materials, Inc.

Tzay-Fa (Jeff) Su

David Tanner

Shuran Sheng

John M White

Soo Young Choi

Eric Andrew Englhardt

Tae Kyung Won

Robert Z Bachrach

Dapeng Wang

Danny Cam Toan Lu

Jeffrey S Sullivan

Yacov Elgar

Asaf Schlezinger

Hien-Minh Huu Le

Yong Kee Chae

Stephen P Murphy

Vicky Svidenko

James Craig Hunter

Charles Gay

Liwei Li

Penchala N Kankanala

Fang Mei

Nicholas G J De Vries

Yong-Kee Chae

Parris Hawkins

Michel Ranjit Frei

Teresa Trowbridge

Chuck Luu

Quancheng (Tommy) Gu

Choi (Gene) Ho

Wing Hoo (Hendrick) Lo

Srujal (Steve) Patel

Matthew J B Saunders

Brice Walker

A method and apparatus for forming solar cells is provided. In one embodiment, a photovoltaic device includes a antireflection coating layer disposed on a first surface of a substrate, a barrier layer disposed on a second surface of the substrate, a first transparent conductive oxide layer disposed on the barrier layer, a conductive contact layer disposed on the first transparent conductive oxide layer, a first p-i-n junction formed on the conductive contact layer, and a second transparent conductive oxide layer formed on the first p-i-n junction.

Method of manufacturing thin film solar cells having a high conversion efficiency

The present invention generally relates to a system that can be used to form a photovoltaic device, or solar cell, using processing modules that are adapted to perform one or more steps in the solar cell formation process. The automated solar cell fab is generally an arrangement of automated processing modules and automation equipment that is used to form solar cell devices. The automated solar fab will thus generally comprise a substrate receiving module that is adapted to receive a substrate, one or more absorbing layer deposition cluster tools having at least one processing chamber that is adapted to deposit a silicon-containing layer on a surface of the substrate, one or more back contact deposition chambers, one or more material removal chambers, a solar cell encapsulation device, an autoclave module, an automated junction box attaching module, and one or more quality assurance modules that are adapted to test and qualify the completely formed solar cell device.

Automated integrated solar cell production line composed of a plurality of automated modules and tools including an autoclave for curing solar devices that have been laminated

One embodiment of the present invention sets forth a computer-implemented method for tuning laser scribe parameters during the fabrication of a solar module. The method includes analyzing the visual appearance of a laser scribe to extract various morphological parameters related to the quality of a laser scribe process used to produce the scribe. Based on the morphological parameters, the laser scribe parameters may be modified in-situ to achieve settings that are optimal for performing laser scribing in each layer of the solar module. As a result, laser scribe process cycle time may be minimized while providing better indication of the laser scribe process stability and quality relative to the prior art approaches.

Scribe process monitoring methodology

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San Jose, CA, United States of America

Tzay-Fa (Jeff) Su