Lam Research Corporation

Tyson Lee Ringold

Richard M Blank

Peter S Thaulad

Arulselvam Simon Jeyapalan

Victor Eduardo Espinosa, Iii

A test wafer having two spaced-apart accelerometers mounted thereon is disclosed. The accelerometers may be positioned at locations located along a common axis passing through the center of gravity of the test wafer. The test wafer may include a controller that may be used to transmit acceleration data collected by the accelerometers to another device. In some implementations, a semiconductor processing tool is provided that includes a test wafer receptacle for storing a test wafer that remains with the semiconductor processing tool and that may be retrieved by a wafer handling robot for performing a test cycle during periods when the wafer handling robot is not performing substrate transport operations.

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Mountain View, CA, United States of America

Tyson Lee Ringold