Taiwan Semiconductor Manufacturing Comp. Ltd.

Tung-Gan Cheng

Hsueh-Cheng Lin

Chia-Fu Tsai

Yaw-Wen Wu

Wen-Lung Ho

Tung-Lung Lai

Cheng-Chao Lin

Jan-Shen Liou

Ray-Wen Tsai

Hung-Tse Huang

Yi-Yu Liu

Andrew Lin

Tung-Liang Wu

Yen-Chi Chen

Chih-Jung Yeh

Ting-Han Ou

Tung-Liang Wua

Ming-Je Li

An apparatus and method for adjusting the position of a load port utilized in a semiconductor wafer processing system. Generally, a door opener can be configured for opening a door through which a semiconductor wafer may enter for subsequent positioning and processing thereof by a semiconductor wafer processing system. A load port is associated with the door opener. A calibration mechanism can then be utilized for calibrating the load port for leveling and height positioning, such that a plurality of directional axis associated with the load port do not interfere with one another, thereby conserving calibration time while permitting a single individual to perform calibration operations thereof.

Precise mechanism for load port adjustment

An apparatus and a method for aligning a loadport on a process machine are disclosed. The apparatus is constructed by a base plate, an alignment block mounted on the base plate, a light source and an optical detector. The alignment block is provided with an aperture extending longitudinally through the block, or formed in a T-shape extending both longitudinally and transversely through the block. The light source may be suitably a laser emission source, or a laser source that operates in a pulse mode. The diameter of the aperture provided in the alignment block should be sufficiently small, i.e. smaller than 5 mm, and preferably smaller than 3 mm.

Optically aligning a loadport on a process machine by transmitting light through a system of apertures

A hand tool for rolling an O-ring under a downward pressure into a slot opening is described. The hand tool is constructed by a tool body that has an arcuate top surface adapted for gripping by a human hand and a planar bottom surface. The planar bottom surface of the tool body is provided with a cavity adapted for receiving a pair of rotatable balls mounted juxtaposed to each other. The pair of rotatable balls are mounted on a shaft through a center aperture of the balls in the cavity in such a way that only less than half of the spherical surface of the balls is protruding beyond the planar bottom surface of the tool body.

Tool for installing seal ring

Growing community of inventors

Tainan, Taiwan

Tung-Gan Cheng