Tel Aviv University

Tsvi Shmilovich

Viacheslav Krylov

Slava Krylov

A tunable tilting device is described. The device includes a tilting element and a suspension structure that has one or more flexures coupled to the tilting element. The suspension structure has a variable bending stiffness and configured to bend due to a tilting motion of the tilting element around a pivot axis. The suspension structure is responsive to a tuning force actuating a variation of an extension stress or a compression stress of the suspension structure, and thereby can vary the bending stiffness of the suspension structure.

Tilting actuator with close-gap electrodes

An electromechanical tilting device including a first and a second electrode structures, shaped, positioned and oriented to define at least partially interdigitated electrodes, and a suspension defining a tilt-containing motion path for the second structure with respect to the first structure. The motion path is selected to cause changes in overlapping regions and overlapping regions' gaps of the interdigitated electrodes. The device is configured such that an increase in one or more voltage bias applied to interdigitated driving electrodes makes a decrease in a total area of overlapping regions of the driving electrodes electrically energetically favorable.

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Tel Aviv, Israel

Tsvi Shmilovich