Ulvac, Inc.

Iwate University

Tsuyoshi Yoshimoto

Yoichi Ohinata

Tomomitsu Ozeki

Tetsuhiro Ohno

Takahiro Mizoguchi

Katsumi Yamane

Takashi Hanamoto

Isao Tada

Tsutomu Nishihashi

Hirohiko Murakami

Takayoshi Hirono

Nobuhiro Hayashi

Masaki Itou

Tomoharu Fujii

Haruhisa Nakano

Kazuhiko Saito

Takumi Komiya

Norihisa Takada

Togo Hosoya

Nobuaki Kakutani

Naoki Sunagawa

Yixin Yang

Hiroyuki Hirano

Yoshiyuki Mitsuhashi

Makoto Miura

Masayuki Iijima

Takuya Morikawa

Sadatsugu Wakamatsu

A freeze-drying apparatus includes a freeze-drying chamber in which an object to be dried using water as a solvent is disposed, a collection chamber provided with a cold trap which connects with the freeze-drying chamber to condense and collect water vapor generated from the object to be dried, measuring devices which measure a state quantity of at least one of the object to be dried, an inside of the freeze-drying chamber, and an inside of the collection chamber, and a determining unit which determines a water vapor mass flow rate based on the state quantity measured by each measuring device, in which the determining unit has measurement models performed to observe the water vapor mass flow rate, and while each measuring device measures the state quantity, a set based on which the water vapor mass flow rate is determined with superiority at the time of the determination is selected.

Freeze-drying device and freeze-drying method

A freeze-drying device includes a controller configured to control depressurization of containers filled with a liquid including a raw material and a medium to freeze the liquid from a liquid surface. The freeze-drying device also includes a gas capture pump configured to exhaust a freeze-drying chamber accommodating the containers, and a positive-displacement pump configured to discharge gas from a space accommodating the gas capture pump. The controller executes an exhaust mitigation process that performs the depressurization at an exhaust capability that is less than a rated exhaust capability of the freeze-drying device. The controller uses a partial pressure value of the medium to determine when the exhaust mitigation process ends. The controller maintains an exhaust speed of the gas capture pump and decreases an exhaust speed of the positive-displacement pump in the exhaust mitigation process.

A freeze-drying method includes depressurizing containers filled with a liquid including a raw material and a medium with a freeze-drying device to freeze the liquid from a liquid surface. The depressurizing includes executing an exhaust mitigation process that performs the depressurizing at an exhaust capability that is less than a rated exhaust capability of the freeze-drying device, and using a partial pressure value of the medium to determine when the exhaust mitigation process ends. The executing an exhaust mitigation process includes maintaining an exhaust speed of a gas capture pump configured to discharge gas from a freeze-drying chamber accommodating the containers, and decreasing an exhaust speed of a positive-displacement pump configured to discharge gas from a space accommodating the gas capture pump.

A freeze vacuum drying apparatus includes: a spraying unit; a pipe unit; a heating unit; and a collection unit. The spraying unit sprays a raw material liquid into a vacuum chamber. The pipe unit has a non-linear shape, includes a first opening end and a second opening end, and traps frozen particles via the first opening end, the frozen particles being formed by self-freezing of liquid droplets formed by spraying the raw material liquid into the vacuum chamber. The heating unit heats the frozen particles in the pipe unit for sublimation drying, the frozen particles moving in the pipe unit from the first opening end toward the second opening end by kinetic energy produced during spraying. The collection unit collects dried particles that are formed by sublimation drying of the frozen particles in the pipe unit and released from the second opening end of the pipe unit.

Freeze vacuum drying apparatus and freeze vacuum drying method

A vacuum drying apparatus includes a chamber, a steam supply line, an evacuation line, a circulation line, and a pressurizing and heating unit. The chamber includes an inlet, an outlet, and a treatment space capable of accommodating food. The steam supply line is connected to the inlet and is configured to be capable of supplying steam into the treatment space. The evacuation line is connected to the outlet and is configured to be capable of evacuating the treatment space. The circulation line is provided outside the chamber and causes steam to circulate from the outlet to the inlet. The pressurizing and heating unit is provided in the circulation line. The pressurizing and heating unit includes a pressurizer which includes a first pump and a flow channel diameter restrictor and pressurizes the steam, a heater which is provided between the first pump and the flow channel diameter restrictor and heats steam pressurized by the pressurizer, and a controller that controls at least one of the first pump or the flow channel diameter restrictor in accordance with a pressure of the heater.

Vacuum drying apparatus and vacuum drying method

Provided is a film-forming apparatus capable of cleaning a discharge apparatus under a state in which a film-forming space and a cleaning gas ambience are separated from each other while continuing to form a film on an object to be film-formed having a film-like shape. The film-forming apparatus includes a cleaning chamber configured to be connected to a film-forming space when a shutter is opened, and to be separated from the film-forming space and cause a cleaning gas to be discharged into an internal space when the shutter is closed; means for moving a discharge apparatus between a cleaning position inside the cleaning chamber and a film-forming position closer to a cylindrical member than the cleaning position; and a control apparatus that controls the discharge apparatus to discharge the raw material gas when the discharge apparatus is moved to the film-forming position, and controls the shutter to be closed so as to fill the cleaning chamber with the cleaning gas when the discharge apparatus is moved to the cleaning position.

Film-forming apparatus

A uniform voltage is applied to loads even to other than a multiple of three loads made of heating lamps connected in parallel to each other, without causing any burden on a primary side. The number of loads is divided into a multiple of three and a multiple of two. A three-phase AC voltage is applied to three primary windings, which are connected as a Y-connection or a &#x394;-connection. Secondary windings, which are each magnetically coupled to a primary winding of a plurality of three-phase transformers and have the same number of turns, are connected with the multiple of three loads.

Vacuum heating device and vacuum heat treatment method

A technology to control temperature of a large substrate to be heated. A temperature sensing device is disposed lateral to a region where a radiation heater faces a substrate to be heated inside a heating chamber. A heating device has the heating chamber, the radiation heater, a power-supply device, a substrate-holding device, a control device, and the temperature sensing device. A control program is built into the control device, according to which the power-supply device controls the power applied to the radiation heater to generate heat such that the temperature of the temperature measurement substrate detected by a thermocouple of the temperature sensing device becomes a set temperature. Furthermore, a circulation passage is disposed in close contact with the temperature-sensing device, and with a coolant flowing through the circulation passage, the temperature of the temperature measurement substrate can be cooled from the set temperature to an initial temperature.

Temperature sensing device and heating device

Growing community of inventors

Chigasaki, Japan

Tsuyoshi Yoshimoto