Fujikin Inc.

Other

Tokyo Electron Limited

Tsuyoshi Tanikawa

Michio Yamaji

Tadayuki Yakushijin

Keisuke Ishibashi

Yasumasa Yanagida

Tomohiro Nakata

Takashi Funakoshi

Nobukazu Ikeda

Kouji Nishino

Migaku Takahashi

Tadahiro Ohmi

Tsuneyuki Okabe

Tomio Uno

Naofumi Yasumoto

Ryosuke Dohi

Hiroyuki Fukuda

Yoshinori Shimomura

Taichi Kitano

Hiroshi Fukuchi

Yasuyuki Yanai

Kenji Yamamoto

Tsutomu Shinohara

Ryousuke Dohi

Yukio Minami

Tetsuya Kojima

Shigeru Itoi

Ichiro Tokuda

Hidenori Kiso

Kuniyasu Sakashita

Hiroaki Kikuchi

Shinichiro Sasaki

Provided is a closing plug capable of easily closing an open end of a flow passage without concern of scale. The closing plug includes: a gasket configured to come into contact with an annular projection formed in a step portion inside the open end of the flow passage of a flow passage block; a columnar pressing member formed by cutting out an inner side of a pressing surface so as to press a peripheral edge portion of the gasket; and a closing plug screw configured to be screwed into a female screw formed in an inner peripheral surface on an open end side from the step portion and press the pressing member toward the gasket by movement caused by screwing.

Closing plug and fluid control device

A gasket includes a thick portion providing a first face seal and a thin portion providing a second face seal. A fluid coupling has an annular gasket housing recess that includes a wide portion for housing the thick portion of the gasket and a narrow portion for housing the thin portion of the gasket.

Gasket for fluid coupling, and fluid coupling

Provided is a flow rate control apparatus capable of being used continuously when the apparatus is used in equipment that operates continuously, and a flow rate control method for the flow rate control apparatus. A flow rate of a fluid is controlled via any one of control valves disposed in branch passages, respectively. When replacement of the one control valve is determined to be necessary on the basis of a signal outputted from a monitoring portion of the one control valve, the one control valve performing flow rate control is closed, and another control valve disposed in another one of the branch passages, is opened, to perform flow rate control with a flow rate equivalent to that before the replacement. Furthermore, on-off valves disposed at upstream and downstream sides of the closed control valve are closed.

Flow rate control apparatus and flow rate control method for the flow rate control apparatus

A first on-off valve () and a second on-off valve () each are a two-port valve. A first passage block () is provided with a first on-off valve-corresponding inflow passage () and a first on-off valve-corresponding outflow passage (). A second passage block () is provided with a second on-off valve-corresponding inflow passage () and a second on-off valve-corresponding outflow passage (). The second on-off valve-corresponding outflow passage () is in communication with an upstream side portion of the first on-off valve-corresponding outflow passage () via a communicating passage () formed in the first passage block (). An orifice () is provided between the second on-off valve-corresponding outflow passage () and the communicating passage ().

Shutoff-opening device

A valve element significantly improved in rotation preventing performance of an abutting member formed of a synthetic resin by using a caulking structure and a high-temperature-oriented valve provided with such a valve element. A valve element includes: an abutting member formed of a synthetic resin and configured to close a path opening by coming into abutment with a path opening edge, and a holding member having a recessed portion into which the abutting member is fitted, in which the holding member is caulked and thus the abutting member is held by the holding member. The holding member is provided with a plurality of notches at a portion to be caulked.

Valve element and high-temperature-oriented valve

A valve element movement mechanism includes: a first valve stem having one end portion to which a first valve element to close and open an area between one of the large diameter portion and the small diameter portion is fixed; a second valve stem having one end portion to which a second valve element to close and open an area between the other of the large diameter portions and the small diameter portion is fixed; a first bellows having one end portion fixed to a first bellows flange and the other end portion fixed to the first valve element; a second bellows having one end portion fixed to a second bellows flange and the other end portion fixed to the second valve element; a frame disposed outside the main passage; and an actuator to move the frame in the directions in which valve elements are closed and opened.

Flow dividing valve

Provided is a fluid controller which enables precise flow-rate adjustment while securing the durability. The fluid controller includes a stem vertical-movement-amount upper-limit-value setting meanswhich sets an upper limit value of a vertical movement amount of a stemassociated with opening and closing operations. The fluid controller further includes a stem vertical-movement-amount fine-adjustment meanswhich changes the vertical movement amount of the stemassociated with the opening and closing operations, within a range of not greater than the upper limit value.

Fluid controller

Provided is a fluid controller in which reduction of the accuracy caused by the loosening of a screw portion and reduction of the durability caused by torsional stress are prevented. A stem vertical-movement-amount adjustment meansis provided with: a handlewhich has a female screwon an inner periphery thereof and which is rotatably supported by a casing; a movable bodyin which a male screwis provided on an outer periphery thereof and is screwed into the inner periphery of the handle; and a guide meanswhich prevents rotation of the movable bodyrelative to the casingand which enables vertical movement of the movable body

Provided is a diaphragm valve whose durability is improved by proper caulking. On a bottom surfaceof a depressionof a body, an annular inner projectionhaving a relatively small diameter and an annular outer projectionhaving a relatively large diameter are provided. A seatis made of synthetic resin and is inserted between the inner projectionand the outer projection. Both projectionsare caulked, whereby the seatis prevented from coming off. The height of the inner projectionis less than that of the outer projection, and a corneron the outside of the inner projectionhas a curved surface.

Diaphragm valve

A vacuum valve is provided with opening pressure setting means that sets a set value of a fluid pressure in a primary side passage beyond which communication is opened and forcible opening means that forcibly opens communication regardless of the fluid pressure in the primary side passage. The opening pressure setting means includes a spring receiver fixed to a stem, a compression coil spring having a lower end supported by the spring receiver, and an adjustment screw, movable in the axial direction, that presses the upper end of the compression coil spring. The forcible opening means includes a piston inserted onto the stemunder the spring receiver so as to be movable upward and downward and piston driving means that moves the piston and the spring receiver upward integrally by moving the piston upward using compressed air.

Vacuum valve

As passages forming a main gas passage, each of the passage blockshas a first inverted-V passage, a first outlet passage communicating between the apex of the first inverted-V passage and an outlet of a first on-off valve. As passages forming a vent gas passage, each of the passage blockshas a second inverted-V passage and a second outlet passage communicating between the apex of the second inverted-V passage and an outlet of a second on-off valve. As passages forming a first sub-gas inflow passage, each of the passage blocks has a first inlet passage leading to an inlet of the first on-off valve and a common inlet passage. As passages forming a second sub-gas inflow passage, each of the passage blocks has a second inlet passage leading to an inlet of the second on-off valve and a communication path continued to the common inlet passage.

Fluid control device

A fluid controller includes an automatic opening-and-closing device configured to move a valve rod upward and downward, and a manual opening-and-closing device configured to move the valve rod upward and downward by a manual operation. The manual opening-and-closing device includes a cylindrical handle supported by a casing so as to be rotatable and not to move upward and downward, and a cylindrical operating member screwed into a female screw of the handle and configured to move upward and downward with a rotation of the handle. The operating member is apart from a piston of the automatic opening-and-closing device in a vertical direction in an automatic operation. The piston is moved by the operating member which moves upward in association with the rotating operation of the handle in a manual operation in an opposite direction from the opening state brought by the automatic opening-and-closing device.

Manual and pressurized fluid controlled fluid controller

There is provided a fluid controller actuator which does not require a plurality of bolts for fixing an inner side spring presser to a casing, in which a configuration is simple and a biasing force of an biasing member can be adjusted from the outside after the assembly. An inner side spring presser includes a shaft portion and a cylinder portion provided at a lower edge portion of the shaft portion, and presses an upper side peripheral edge portion of a through hole of a biasing member by a lower end of the cylinder portion. The shaft portion penetrates an outer side spring presser and extends upwardly. An adjustment screw which positions the inner side spring presser as a lower end abuts against an upper surface of the shaft portion of the inner side spring presser, is screwed to a top wall of a casing.

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Osaka, Japan

Tsuyoshi Tanikawa