Tokyo Electron Limited

Tohoku University

Fujikin Inc.

Ckd Corporation

Tsuyoshi Shimazu

Kazuyuki Miura

Nobukazu Ikeda

Kouji Nishino

Tsutomu Shinohara

Ryousuke Dohi

Masaaki Nagase

Kaoru Hirata

Katsuyuki Sugita

Takashi Hirose

Toshihide Yoshida

Hisashi Tanaka

Tomokazu Imai

Shoichi Hino

Masahito Saito

Tadahiro Ohmi

Hiroki Endo

Hideki Nagaoka

Keiki Ito

Daisuke Hayashi

Hiroshi Koizumi

Jun Ooyabu

Jun Hirose

Takashi Kitazawa

Minoru Ito

Hiroki Doi

Tetsujiro Kono

Osamu Katsumata

A pressure type flow rate control apparatus is provided wherein flow rate of fluid passing through an orifice is computed as Qc=KP(where K is a proportionality constant) or as Qc=KP(P-P)(where K is a proportionality constant, m and n constants) by using orifice upstream side pressure Pand/or orifice downstream side pressure P. A fluid passage between the downstream side of a control valve and a fluid supply pipe of the pressure type flow rate control apparatus comprises at least 2 fluid passages in parallel, and orifices having different flow rate characteristics are provided for each of these fluid passages, wherein fluid in a small flow quantity area flows to one orifice for flow control of fluid in the small flow quantity area, while fluid in a large flow quantity area flows to the other orifice for flow control of fluid in the large flow quantity area.

Flow rate range variable type flow rate control apparatus

A pressure type flow rate control apparatus is provided wherein flow rate of fluid passing through an orifice is computed as Qc=KP(where K is a proportionality constant) or as Qc=KP(P&#x2212;P)(where K is a proportionality constant, m and n constants) by using orifice upstream side pressure Pand/or orifice downstream side pressure P. A fluid passage between the downstream side of a control valve and a fluid supply pipe of the pressure type flow rate control apparatus comprises at least 2 fluid passages in parallel, and orifices having different flow rate characteristics are provided for each of these fluid passages, wherein fluid in a small flow quantity area flows to one orifice for flow control of fluid in the small flow quantity area, while fluid in a large flow quantity area flows to the other orifice for flow control of fluid in the large flow quantity area.

A partial pressure control systemincludes two valveswhich are branched from an operation gas supply pipeand which variably control operation gas, pressure sensorswhich are respectively connected to the each valvesin series and which detect pressure of the operation gas, and a controllerwhich proportionally controls the operation of the valvesbased on detection result of the pressure sensors, thereby relatively controlling pressures Pand Pof the two valves. With this configuration, it is possible to reduce wastefull consumption of the operation gas, and to enhance the responsivity with respect to change of setting and the like.

Flow rate control system and shower plate used for partial pressure control system

Partial pressure control system, flow rate control system and shower plate used for partial pressure control system

Provided is a relative pressure control system has a simple configuration, but enables accurate regulation of a division ratio of an operation gas, and concurrently makes it possible to securely drain the operation gas from an operation gas pipeline in case of emergency. The system includes a plurality of air operated valves of a normally open type that are connected to an operation gas pipeline supplied with an operation gas; pressure sensors that are series connected to the respective air operated valves and that detect output pressures of the respective air operated valves; a controller that controls operation pressures of the respective air operated valves in accordance with the pressures detected by the pressure sensors; and a hard interlock solenoid valve that correlates the plurality of air operated valves to one another so that at least one of the plurality of air operated valves is normally opened. In the configuration, an opening of a specified one of the plurality of air operated valves is regulated, the operation gas is output at a predetermined division ratio.

Relative pressure control system and relative flow control system

Growing community of inventors

Miyagi, Japan

Tsuyoshi Shimazu